Lithographic properties of novel acetal-derivatized hydroxy styrene polymers

已完结 20 由 chxyyd 发布于 2026/5/12 8:38:45

DOI:10.1117/12.350222
作者：Sanjay Malik, A. J. Blakeney, L. Ferreira, B. Maxwell, Allyn Whewell, T. Sarubbi, M. Bowden, Veerle van Driessche, Toru Fujimori, Shiro Tan, Toshiaki Aoai, K. Uenishi, Y. Kawabe, T. Kokubo
文献类型：期刊论文
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International Society for Optics and Photonics (SPIE)

Abstract：Lithographic properties of a variety of acetal-derivatized styrene based polymers are reported. The structural modifications in the polymers involve varying the size of the pendent acetal mo

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