Reduction of trap density in high-k dielectrics through optimized ALD process and high-pressure deuterium annealing
已完结10由 我不看月亮 发布于 2025/12/25 15:02:36
DOI:10.1016/j.mssp.2025.109380
作者:Taewon Hwang , Su-Hwan Choi , Ki-Cheol Song , Yeonhee Lee , Jae-Hyeok Kwag , Jun-Yeoub Lee , Chang-Kyun Park , Jin-Seong Park
文献类型:期刊论文
补充材料:只需要正文