Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL.

微信好友朋友圈 QQ好友复制链接

发文信息

Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL. - 最新文献

Influence of Plasma Species on the Growth Mode and Material Properties of Indium Nitride Grown by Plasma-Assisted Atomic Layer Epitaxy.

Pub Date : 2021-04-01 DOI: 10.2172/1862766 J. Woodward, Samantha Rosenberg, D. Boris, S. Johnson, Z. Robinson, M. Mastro, K. Ludwig, Charles R Eddy Jr., J. Hite

免责声明：
本页显示期刊或杂志信息，仅供参考学习，不是任何期刊杂志官网，不涉及出版事务，特此申明。如需出版一切事务需要用户自己向出版商联系核实。若本页展示内容有任何问题，请联系我们，邮箱：info@booksci.cn，我们会认真核实处理。

Book学术文献互助群
群号：604180095

文献互助智能选刊最新文献互助须知联系我们：info@booksci.cn

Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。

Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL.

发文信息

同类期刊

Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL. - 最新文献

Influence of Plasma Species on the Growth Mode and Material Properties of Indium Nitride Grown by Plasma-Assisted Atomic Layer Epitaxy.