{"title":"Process Enabler and Design Opportunities for Fully Safeguarding Against the Massive Presence of Reliability Defects","authors":"L. Sheng","doi":"10.1109/ASMC51741.2021.9435679","DOIUrl":null,"url":null,"abstract":"We have simultaneously addressed two major challenges in semiconductor reliability engineering. One is how to characterize a genetically defective component with a massive presence of reliability defects. The other is how to passivate all the defects for measuring up to our ultimate goal of zero failures in the field. This paper highlights a decade-long case study and follow-up on many millions of IC (integrated circuit) shipments. Our insightful characterizations of defects have enabled the process maturation and the discovery of a novel design-for-reliability (DfR). Correspondingly, the mitigating measures have suppressed defects by several orders of magnitude and resulted in zero returns from a broad range of customers. Furthermore, our collective approach promises the narrative of our Road to Zero Defects, where the sky is the limit.","PeriodicalId":347586,"journal":{"name":"2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"104 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC51741.2021.9435679","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have simultaneously addressed two major challenges in semiconductor reliability engineering. One is how to characterize a genetically defective component with a massive presence of reliability defects. The other is how to passivate all the defects for measuring up to our ultimate goal of zero failures in the field. This paper highlights a decade-long case study and follow-up on many millions of IC (integrated circuit) shipments. Our insightful characterizations of defects have enabled the process maturation and the discovery of a novel design-for-reliability (DfR). Correspondingly, the mitigating measures have suppressed defects by several orders of magnitude and resulted in zero returns from a broad range of customers. Furthermore, our collective approach promises the narrative of our Road to Zero Defects, where the sky is the limit.