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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Software-based development of 3D integration flows 三维集成流程的软件开发
A. Grunewald, K. Hahn, R. Bruck
In recent years 3D IC design and manufacturing is continuously emerging. Along with the variety of possibilities on how to vertically integrate two or more dies, many aspects including cost, design and choice of technology must be considered. Therefore a design methodology and software implementation is presented in this paper which makes use of the mutual dependency of design and process technology in order to provide a manufacturable integration flow.
近年来,3D集成电路设计和制造不断涌现。除了如何垂直整合两个或多个模具的各种可能性之外,还必须考虑许多方面,包括成本,设计和技术选择。因此,本文提出了一种利用设计技术和工艺技术相互依赖的设计方法和软件实现,以提供一个可制造的集成流程。
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引用次数: 4
Correlation study on moisture soak equivalent between MSL1 (85/85% soaking 168 hours) and Autoclave test in term of weight gain and delamination MSL1(85/85%浸泡168小时)与蒸压试验在增重和分层方面的水分浸泡当量相关性研究
J. Lim
Delamination is very critical for Power Mosfet devices especially Die Attach (DA) delamination. This is due to drain is always connected to Die Attach Paddle (DAP) area using interconnect (soft solder or epoxy type). When there is DA delamination occuring, resistance between Drain and Source will increase causing slow switching time on Power Mosfet devices. Since delamination is very crucial for Power Mosfet, a lot of design of engineerings (DOEs) are performed using on Moisture Sensitivity Level 1 (MSL 1) to screen the delamination. However MSL 1 always takes considerable long duration (168hrs) to complete the study. Time to market release of the products will be further delayed when repeat DOE is needed. This paper will discuss correlation study between Autoclave test (ACLV) and MSL 1 in term of delamination and weight gain (moisture absorption) of mold compound been done. Three mold compounds have been selected to perform weight gain study and delamination check to correlate MSL 1 versus ACLV test. Results on correlation between MSL 1 (85/85% soaking 168 hours) versus ACLV found DOE study can be used in evaluation stage to reduce DOE duration as it is comparable.
对于功率Mosfet器件来说,分层是非常关键的,尤其是贴装芯片(DA)的分层。这是由于排水总是连接到模具附加桨(DAP)区域使用互连(软焊料或环氧型)。当发生数模分层时,漏极和源极之间的电阻将增加,导致功率Mosfet器件的开关时间变慢。由于脱层对功率Mosfet至关重要,因此许多工程设计(do)都使用1级湿敏(MSL 1)来筛选脱层。然而,MSL 1总是需要相当长的时间(168小时)来完成研究。当需要重复DOE时,产品的上市时间将进一步推迟。本文将讨论高压灭菌试验(ACLV)与MSL - 1在模具复合材料分层和增重(吸湿)方面的相关性研究。选择三种霉菌化合物进行增重研究和分层检查,以确定MSL 1与ACLV试验的相关性。MSL 1(85/85%浸泡168小时)与ACLV的相关性研究结果表明,DOE研究具有可比性,可用于评估阶段以缩短DOE持续时间。
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引用次数: 2
Effects of stacking sequence of electrodeposited Sn and Bi layers on reflowed Sn-Bi solder alloys 电沉积锡、铋层叠加顺序对回流锡铋钎料合金的影响
Seen Fang Lee, Yingxin Goh, A. Haseeb
Eutectic Sn-Bi alloy is gaining considerable attention in the electronic packaging applications. This alloy exhibits favorable properties such as low melting temperature, good wettability, high yield strength and fracture strength at room temperature. Miniaturization of electronic devices limited the choices of deposition technique where electrodeposition is identified as one of the most suitable ones. This work focuses on the formation of eutectic Sn-Bi solder alloys by reflowing a metal stack containing sequentially electrodeposited Sn and Bi layers. Three layer sequential deposition of Sn-Bi alloys is a new attempt in the electroplating field. The effects of layer sequence on the composition and microstructure of the resulting alloy is investigated. Irrespective of the layering sequence, a homogeneous microstructure is achieved after reflow. Near-eutectic alloy of composition Sn- 54.6 wt.% Bi is obtained from this sequential plating method.
共晶锡铋合金在电子封装领域的应用日益受到重视。该合金具有熔点低、润湿性好、室温屈服强度和断裂强度高等优良性能。电子器件的小型化限制了沉积技术的选择,其中电沉积被认为是最合适的沉积技术之一。这项工作的重点是形成共晶锡铋焊料合金通过回流的金属堆栈包含顺序电沉积锡和铋层。三层连续沉积锡铋合金是电镀领域的一种新尝试。研究了层序对合金成分和组织的影响。无论分层顺序如何,回流后均可获得均匀的微观结构。用这种顺序镀法制备了成分为Sn- 54.6% wt.% Bi的近共晶合金。
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引用次数: 4
Challenges in solder on leadframe packages 引线框架封装的焊料挑战
Chee Yin Khuen, Thong Kai Choh
Power device application is one of the highest growth sectors in today's semiconductor technology. The main applications for power devices are switches or rectifiers used in servers, desktops, notebook, cell phone etc. From a packaging perspective, power devices are characterised by its ability and efficiency in conducting high current. To conduct high current, a power package must have low electrical resistance and good thermal dissipation system. As such, applying solder as interconnect between the die and the leadframe or cu clips to mosfets is by far the best solution for thermal dissipation and electrical conductivity. This is because solder poses superior thermal conductivity performance (approximate 3 times better than high thermal conductive epoxy & approximate 10 times lower in terms of volume resistivity). In the industry today, typical power package that applies conductive epoxy handles about 2~16A current while package applies solder capable to handles 25~60A current. As such, solder will continue to be the preferred material over epoxy for power packages that requires high current. This paper will discuss on the challenges faced when using solder as the die attach material on leadframe based packages.
功率器件应用是当今半导体技术中增长最快的领域之一。功率器件的主要应用是用于服务器、台式机、笔记本电脑、手机等的开关或整流器。从封装的角度来看,功率器件的特点是其传导大电流的能力和效率。为了实现大电流的传输,电源封装必须具有低电阻和良好的散热系统。因此,应用焊料作为芯片和引线框架之间的互连或铜夹到mosfet是迄今为止散热和导电性的最佳解决方案。这是因为焊料具有优越的导热性能(比高导热环氧树脂好约3倍,体积电阻率低约10倍)。在当今的工业中,典型的电源封装采用导电环氧树脂处理约2~16A电流,而封装采用能够处理25~60A电流的焊料。因此,对于需要大电流的电源封装来说,焊料将继续成为比环氧树脂更好的材料。本文将讨论在引线框架封装中使用焊料作为封装材料时所面临的挑战。
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引用次数: 0
Reliable ultra-low-loop bonding approach on X2/X3 thin QFN 在X2/X3薄QFN上可靠的超低环粘接方法
S. H. Liew, W. Law
Smart mobile devices such as smart phones & tablets are gaining tremendous growth in the consumer market due to their ability to offer greater functionality and ease of use such as voice and SMS coupled with mobile internet applications, multimedia functionality, high speed data processing capabilities, and inbuilt GPS capabilities, not forgetting the cm mm-sized thickness platform that makes them easily transportable, readily accompanied or even wearable. These requirements for higher integration & miniaturization drive integrated circuits (ICs) to be packaged towards thinner, smaller or more complex configurations. Multidie within a package will most likely to be the configuration used to attain higher integration. With wirebonding as still the preferred interconnection method of choice, be it between die to leadframe or die to die, these in turn drive the interconnections towards various advanced looping trajectories such as multi-height loops, long wires or ultra-low-loop. When the wire loop height gets low as in the ultra-low loop, there would be potential of the neck damage as well as wire shorting/collapsing to the surface beneath it. Looping gets even more challenging when the wire length gets longer with ultra-low loop bonding at the same time. This paper will discuss on the forming of reliable ultra-low-loop for various configurations in the QFN thin packages, eg. X2 (max0.4mm package thickness) or X3 (max 0.3mm package thickness), through the selection of wires, shapes of the loop profile, supporting tools, while maintaining high quality and reliability at post-bond and post-mold conditions. Finally, full reliability testing and qualification will be performed on the ultra-low-loop for various configurations to ensure robustness of the looping.
智能手机和平板电脑等智能移动设备在消费市场上获得了巨大的增长,因为它们能够提供更大的功能和易用性,如语音和短信,再加上移动互联网应用程序,多媒体功能,高速数据处理能力和内置GPS功能,不要忘记厘米大小的厚度平台,使它们易于运输,随时陪同,甚至可穿戴。这些对更高集成度和小型化的要求促使集成电路(ic)朝着更薄、更小或更复杂的配置封装。一个封装内的多个芯片将最有可能是用于获得更高集成度的配置。由于线键连接仍然是首选的互连方法,无论是在模具到引线框架之间还是在模具到模具之间,这些反过来又将互连推向各种先进的环路轨迹,例如多高度环路,长线或超低环路。当线圈高度较低时,如在超低线圈中,将有可能损坏颈部以及电线短路/塌陷到其下方的表面。当导线长度变长且同时具有超低环粘合时,环接变得更加具有挑战性。本文将讨论QFN薄封装中各种配置的可靠超低环路的形成,例如:X2(最大0.4mm包厚)或X3(最大0.3mm包厚),通过选择线材、环形轮廓形状、配套工具,同时在粘接后和模具后条件下保持高质量和可靠性。最后,将对各种配置的超低回路进行全面可靠性测试和鉴定,以确保回路的鲁棒性。
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引用次数: 2
Microstructural stability and mechanical properties of Sn-1Ag-0.5Cu solder alloy with 0.1 wt.% Al addition under high-temperature annealing 添加0.1 wt.% Al的Sn-1Ag-0.5Cu钎料合金高温退火组织稳定性及力学性能
M. Sabri, D. A. Shnawah, I. Badruddin, S. Said
Effects of 0.1 wt.% Al addition on the microstructural stability and mechanical properties of the low-Ag-content Sn-1Ag-0.5Cu (SAC105) solder alloy under high-temperature aging were investigated. Addition of Al suppresses the formation of Cu6Sn5 intermetallic compound (IMC) particles and leads to the formation of large AlCu IMCs. Moreover, the Ag3Sn IMC particles become larger and less-packed in the interdendritic regions after the additions of Al. The addition of Al also leads to enlarge the primary β-Sn dendrites and diminish the interdendritic regions. The tensile test results indicate that the addition of Al significantly decreases the elastic modulus, yield strength, and total elongation. After 720 h and 24 h of aging at 100°C and 180°C, respectively, the Al-bearing SAC105 solder alloy exhibits more resistance to microstructural coarsening than the SAC105 solder alloy which in turn significantly reduces the mechanical properties degradation with aging.
研究了添加0.1 wt.% Al对低银Sn-1Ag-0.5Cu (SAC105)钎料合金高温时效组织稳定性和力学性能的影响。Al的加入抑制了Cu6Sn5金属间化合物(IMC)颗粒的形成,导致较大AlCu金属间化合物的形成。Al的加入使Ag3Sn IMC晶粒变大,枝间区域的堆积变少。Al的加入使初生β-Sn枝晶变大,枝间区域变小。拉伸试验结果表明,Al的加入显著降低了材料的弹性模量、屈服强度和总伸长率。在100℃和180℃下分别时效720 h和24 h后,含al的SAC105钎料合金表现出比SAC105钎料合金更强的抗组织粗化能力,从而显著降低了力学性能随时效而退化的程度。
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引用次数: 0
Elimination of epoxy bridging in diebond process 二粘过程中环氧桥接的消除
N. Yap, C. Hermosura, F. Pascual
Diebond process is one of the key assembly process step in terms of defining reliability and performance of an integrated circuit, IC product. The process requires epoxy dispense accuracy and consistency to ensure that IC is secured and within the required position in the lead frame pad ready for wire bonding. These requirements though in the realm of assembly manufacturing is easier said than done. In the actual manufacturing Diebond process environment, there are several machine technologies that process different devices of IC. This complex condition coupled with increasing volume for processing was observed to be potentially related to the increase of Epoxy bridging defect. Normally a unit of IC with Epoxy bridging defect fails electrical testing as the conductive epoxy tails or spreads connecting the lead frame flag and the internal leads causing electrical short. However there are cases of very thin Epoxy bridging that can pass electrical test which has a risk of failing during application. ON Semiconductor Philippines Inc, OSPI formed a DMAIC team to immediately address opportunities in the trend of Epoxy bridging. Using the disciplined Six Sigma approach, the team identified Z level offset and Z level position as key input variable, KPIV using a resolution 4 fractional factorial design of experiment. These KPIV was found necessary as standard for all Diebond machine technologies. And even with the complexity of number of devices, with this KPIV's controlled and locked, Epoxy bridging was eliminated.
Diebond工艺是定义集成电路产品可靠性和性能的关键组装工艺步骤之一。该工艺要求环氧树脂分配的准确性和一致性,以确保IC是安全的,并在引线框架垫的要求位置内,为电线粘合做好准备。虽然在装配制造领域,这些要求说起来容易做起来难。在实际制造迪邦工艺环境中,有几种机器技术可以加工不同的集成电路器件。这种复杂的条件加上加工体积的增加,可能与环氧桥接缺陷的增加有关。通常情况下,具有环氧桥接缺陷的集成电路单元不通过电气测试,因为导电环氧树脂在连接引线框架标志和内部引线时尾部或扩散,导致电气短路。然而,有些情况下,非常薄的环氧桥接可以通过电气测试,但在应用过程中有失败的风险。安森美半导体菲律宾公司成立了一个DMAIC团队,以立即解决环氧桥接趋势中的机会。使用严格的六西格玛方法,团队确定Z水平偏移和Z水平位置作为关键输入变量,KPIV使用分辨率4分数因子设计的实验。这些KPIV被认为是所有迪邦机器技术的必要标准。即使设备数量复杂,但由于该KPIV的控制和锁定,环氧桥接也被消除了。
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引用次数: 2
A cost effective method to test RF power on the ATE in manufacturing 一种具有成本效益的测试制造过程中射频功率的方法
Chek Yean Feng
Today the device that required intensive RF testing in mass production is commonly performed using the expensive high end automated test equipment (ATE) installed with RF/microwave resources for measuring and analyzing the RF signals. We can reduce test cost if one could develop the RF test on the basic ATE without RF resources. The paper proposes a test method using the on board RF power detector to measure the RF output signal beyond 1.0GHz for a device under test (DUT) with expected power level from -5dBm to +3dBm. The proposed method has been applied to test clocking and timing devices with internal voltage control oscillator (VCO) in the production and achieved significant test time improvement.
如今,在大规模生产中需要密集RF测试的设备通常使用昂贵的高端自动化测试设备(ATE)来执行,该设备安装了RF/微波资源,用于测量和分析RF信号。如果能在没有射频资源的基础上开发射频测试,可以降低测试成本。本文提出了一种利用板载射频功率检测器测量被测设备(DUT)在-5dBm至+3dBm期望功率电平范围内1.0GHz以上的射频输出信号的测试方法。该方法已应用于生产中带有内压控制振荡器(VCO)的时钟和定时器件的测试,测试时间明显缩短。
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引用次数: 0
Study on reliability test of die attach material 模具附着材料可靠性试验研究
Lim Chuan Yik, Y. B. Kar, N. Shafika
Silver plated copper is a new developed die attachment material to replace pure silver. As year past, price of silver getting higher and become a problem for those semiconductors packaging company. Therefore, silver plated copper was developed as new die attachment material to solve the costing problem. But the characteristic and reliability of silver plated copper filler has be a doubt to replace the pure silver in the market. This paper will review few test method to test on the reliability of silver plated copper filler and proved that it is as good as silver to be the filler.
镀银铜是一种新开发的代替纯银的模具附件材料。近年来,银价不断上涨,成为半导体封装企业的一大难题。因此,开发镀银铜作为新型的模具附件材料来解决成本问题。但镀银铜填料的特性和可靠性一直是市场上替代纯银的一个疑问。本文综述了几种测试镀银铜填料可靠性的方法,证明了镀银铜填料的可靠性与镀银一样好。
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引用次数: 1
Characterization of a wire bonding process with the added challenges from palladium-coated copper wires 带钯包覆铜线的焊线工艺特性分析
A. Chang, A. B. Lim, C. Lee, B. Milton, H. Clauberg, O. Yauw, B. Chylak
In this study, we experimented with palladium-coated copper (PdCu) wires of different diameters (0.6 mil, 0.7 mil and 0.8 mil) and from different manufactures. It was seen that wire diameters that varied within the manufacturing tolerances show an effect on bonding responses. The effect was especially prominent in the production environment, for example, when electric-flame-off (EFO) time remained fixed and free air ball (FAB) and subsequent bonded ball size varied according to the variation in wire diameter. The effect of Pd thickness control in PdCu wire was also studied and its implication to bonding responses is presented. Aside from the variations from the wires, bonding parameters such as EFO conditions, cover gas types, and gas flow rates were also found to affect wire bonding responses by varying degrees for wires from different suppliers. All of these observations suggest the added complications and considerations necessary when dealing with PdCu wire. Therefore, ensuring an understanding of the wire characteristics, especially pertaining to the Pd coating and their relations to wire bonding responses, is critical in overcoming these additional challenges.
在这项研究中,我们对不同直径(0.6 mil, 0.7 mil和0.8 mil)和不同制造商的镀钯铜(PdCu)线进行了实验。可以看出,在制造公差范围内变化的线径对键合响应有影响。这种影响在生产环境中尤为突出,例如,当电燃(EFO)时间保持固定,自由空气球(FAB)和随后的粘合球尺寸根据线材直径的变化而变化时。研究了Pd厚度控制对PdCu线的影响及其对键合响应的影响。除了焊丝的差异外,EFO条件、覆盖气体类型和气体流速等粘合参数也会对不同供应商的焊丝的粘合反应产生不同程度的影响。所有这些观察都表明,在处理PdCu线时需要增加复杂性和考虑因素。因此,确保了解线材特性,特别是Pd涂层及其与线材键合响应的关系,对于克服这些额外的挑战至关重要。
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引用次数: 6
期刊
2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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