Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第7页

Development of micro-nibbling method based on dieless punching 基于无模冲孔的微蚕食方法的发展

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.010

Kai Egashira, Taiki Mizutani

The nibbling process is a method used to cut arbitrary features from thin sheets by continuously piercing partially overlapping holes to form slits. While laser processing is currently the dominant method for such cutting, nibbling offers several advantages, including lower operational costs and the absence of thermal effects on the workpiece. In microfabrication, laser processing has inherent limitations that present both technical and financial challenges. Therefore, this study developed a micro-nibbling method for fabricating microfeatures using a dieless punching technique, where the workpiece is supported from underneath by a backing material, eliminating the need for a die and die set assembly and enabling the practical use of micropunches. A punching device specifically designed for micropunches, fabricated from cemented tungsten carbide using electrical discharge machining, was employed with stainless steel sheets as the workpiece. Initial experiments used a 20 μm-diameter punch on a 5 μm-thick sheet, varying the punch feed pitch from 5 to 15 μm, and successfully produced slits at all pitches, demonstrating the feasibility of the method. Subsequently, punches with diameters below 10 μm were used on 3 μm-thick sheets with feed pitches ranging from 3 to 8 μm. Additionally, slit-and-space patterns were produced using a 5 μm-diameter punch on 2 μm-thick sheets, yielding slits approximately 5 μm wide with comparable spacing. Rotating the punch at 1000 min⁻¹ significantly reduced the punch load compared with non-rotating punches. Finally, the fabrication of cut-out pieces, including a 120 μm square and a 300 μm-radius sector on 5 μm-thick sheets, demonstrated the versatility and applicability of the proposed micro-nibbling method.

蚕食工艺是一种通过连续地穿透部分重叠的孔以形成狭缝来从薄板上切割任意特征的方法。虽然激光加工目前是这种切割的主要方法，但蚕食有几个优点，包括较低的操作成本和对工件没有热效应。在微加工中，激光加工具有固有的局限性，这在技术和财务上都是一个挑战。因此，本研究开发了一种使用无模冲孔技术制造微特征的微蚕食方法，其中工件由衬底材料从下方支撑，消除了对模具和模具组合的需要，并使微冲孔的实际使用成为可能。以不锈钢片为加工对象，采用电火花加工技术制备了一种专门用于微冲孔的硬质合金冲孔装置。初始实验采用直径为20 μm的冲床在5 μm厚的板料上，改变冲床进给间距为5 ~ 15 μm，并成功地在所有间距上产生狭缝，证明了该方法的可行性。随后，将直径小于10 μm的冲头用于3 μm厚的板材，进料间距为3 ~ 8 μm。此外，在厚度为2 μm的薄片上使用直径为5 μm的冲孔，可产生宽度约为5 μm的狭缝。与非旋转冲床相比，以1000分钟−1旋转冲床显着降低了冲床负载。最后，在5 μm厚的薄片上制备了120 μm正方形和300 μm半径扇形的切割片，验证了该方法的通用性和适用性。

{"title":"Development of micro-nibbling method based on dieless punching","authors":"Kai Egashira, Taiki Mizutani","doi":"10.1016/j.precisioneng.2025.11.010","DOIUrl":"10.1016/j.precisioneng.2025.11.010","url":null,"abstract":"<div><div>The nibbling process is a method used to cut arbitrary features from thin sheets by continuously piercing partially overlapping holes to form slits. While laser processing is currently the dominant method for such cutting, nibbling offers several advantages, including lower operational costs and the absence of thermal effects on the workpiece. In microfabrication, laser processing has inherent limitations that present both technical and financial challenges. Therefore, this study developed a micro-nibbling method for fabricating microfeatures using a dieless punching technique, where the workpiece is supported from underneath by a backing material, eliminating the need for a die and die set assembly and enabling the practical use of micropunches. A punching device specifically designed for micropunches, fabricated from cemented tungsten carbide using electrical discharge machining, was employed with stainless steel sheets as the workpiece. Initial experiments used a 20 μm-diameter punch on a 5 μm-thick sheet, varying the punch feed pitch from 5 to 15 μm, and successfully produced slits at all pitches, demonstrating the feasibility of the method. Subsequently, punches with diameters below 10 μm were used on 3 μm-thick sheets with feed pitches ranging from 3 to 8 μm. Additionally, slit-and-space patterns were produced using a 5 μm-diameter punch on 2 μm-thick sheets, yielding slits approximately 5 μm wide with comparable spacing. Rotating the punch at 1000 min<sup>−1</sup> significantly reduced the punch load compared with non-rotating punches. Finally, the fabrication of cut-out pieces, including a 120 μm square and a 300 μm-radius sector on 5 μm-thick sheets, demonstrated the versatility and applicability of the proposed micro-nibbling method.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 953-960"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Diameter measurement of nano/micro-optical fiber based on effective refractive index including uncertainty analysis with Monte Carlo simulation 基于有效折射率的纳米/微光纤直径测量及蒙特卡罗模拟不确定性分析

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-09-12 DOI: 10.1016/j.precisioneng.2025.09.009

Masaki Michihata, Yushen Liu, Shuzo Masui, Satoru Takahashi

Optical fibers with diameters of a few micrometers or less are essential devices in next-generation optical circuits and quantum photonics, so an accurate measurement technique of the fiber diameter is indispensable for performing their functions. Because nano/micro-optical fibers form an evanescent light field around their surface, the effective refractive index depends on the cross-sectional area of the optical fiber and the surrounding air, which also determines the propagation constant of the propagating light in the fiber. Based on the optical relationship, we proposed a principle to measure the fiber diameter by measuring the propagation constant with the scanning near field optical (SNOM) probe, and evaluated its measurement performance by means of uncertainty analysis. The proposed method is measurable in the single mode region, so that, for example, using 1550 nm, a diameter range from 350 nm to 1.1 μm can be measured. Detailed experimental evaluations of the measurement reliability were conducted, and then, the uncertainty of measurement was evaluated using Monte Carlo simulation. Based on the results of the uncertainty analysis, it was stated that the uncertainty of measurement can be minimized in diameter measurement by optimizing the working wavelength of the measurement system. It was experimentally shown that a relative uncertainty of about ±5.7 % (k = 2) was possible.

直径在几微米以下的光纤是下一代光电路和量子光子学中必不可少的器件，因此精确的光纤直径测量技术是实现其功能的必要条件。由于纳米/微光纤在其表面周围形成倏逝光场，因此有效折射率取决于光纤与周围空气的横截面积，这也决定了传播光在光纤中的传播常数。基于光学关系，提出了一种利用扫描近场光学探头测量传输常数来测量光纤直径的原理，并通过不确定度分析对其测量性能进行了评价。该方法可以在单模区域内测量，例如，使用1550 nm，可以测量350 nm到1.1 μm的直径范围。对测量的可靠性进行了详细的实验评估，然后利用蒙特卡罗模拟对测量的不确定度进行了评估。在不确定度分析的基础上，指出通过优化测量系统的工作波长，可以使直径测量的不确定度最小化。实验表明，相对不确定度可达±5.7% （k = 2）。

{"title":"Diameter measurement of nano/micro-optical fiber based on effective refractive index including uncertainty analysis with Monte Carlo simulation","authors":"Masaki Michihata, Yushen Liu, Shuzo Masui, Satoru Takahashi","doi":"10.1016/j.precisioneng.2025.09.009","DOIUrl":"10.1016/j.precisioneng.2025.09.009","url":null,"abstract":"<div><div>Optical fibers with diameters of a few micrometers or less are essential devices in next-generation optical circuits and quantum photonics, so an accurate measurement technique of the fiber diameter is indispensable for performing their functions. Because nano/micro-optical fibers form an evanescent light field around their surface, the effective refractive index depends on the cross-sectional area of the optical fiber and the surrounding air, which also determines the propagation constant of the propagating light in the fiber. Based on the optical relationship, we proposed a principle to measure the fiber diameter by measuring the propagation constant with the scanning near field optical (SNOM) probe, and evaluated its measurement performance by means of uncertainty analysis. The proposed method is measurable in the single mode region, so that, for example, using 1550 nm, a diameter range from 350 nm to 1.1 μm can be measured. Detailed experimental evaluations of the measurement reliability were conducted, and then, the uncertainty of measurement was evaluated using Monte Carlo simulation. Based on the results of the uncertainty analysis, it was stated that the uncertainty of measurement can be minimized in diameter measurement by optimizing the working wavelength of the measurement system. It was experimentally shown that a relative uncertainty of about ±5.7 % (<em>k</em> = 2) was possible.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 303-316"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research on polishing trajectory planning method for leading/trailing edge based on polishing removal model of counter torus flexible tool 基于反环面柔性刀具抛光去除模型的前尾缘抛光轨迹规划方法研究

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.008

Zhang Yun , An Di , Ye Huan , Chen Zhitong , Cheng Geng , Liu Jingqing

To address the challenge of collaborative optimization between material removal efficiency and surface consistency caused by non-uniform machining allowances in the polishing of aero-engine blade leading/trailing edges, this paper proposes a trajectory planning method based on a removal model and a counter torus flexible polishing tool. By defining the counter torus flexible tool, a material removal model incorporating parameters such as curvature radius and preload is established through Hertz contact theory and orthogonal experimental data. Based on this model, a tool positioning coordinate system is constructed, and the tool posture is optimized by adjusting the yaw angle and rake angle to establish a trajectory optimization model with the goal of minimizing the average absolute deviation of cutting depth. Experiments show that when machining simple and complex blades with the counter torus flexible tool, the number of tool paths required is 9.8 % and 23.1 % of that of conventional convex tools, respectively. The surface roughness is better than Ra 0.4 μm, and the uniformity of material removal depth at the leading/trailing edges is significantly improved. This method provides theoretical and technical support for high-precision and high-efficiency polishing of aero-engine blade leading/trailing edges.

针对航空发动机叶片前后缘抛光过程中加工余量不均匀导致的材料去除效率与表面一致性协同优化问题，提出了一种基于去除模型和反环面柔性抛光工具的轨迹规划方法。通过定义反环面柔性刀具，利用赫兹接触理论和正交实验数据，建立了包含曲率半径和预紧力等参数的材料去除模型。基于该模型，构建刀具定位坐标系，通过调整横摆角和前倾角对刀具姿态进行优化，建立以切削深度平均绝对偏差最小为目标的轨迹优化模型。实验表明，用反环面柔性刀具加工简单和复杂叶片时，所需的刀路数分别是常规凸刀的9.8%和23.1%。表面粗糙度优于Ra 0.4 μm，前后缘材料去除深度均匀性显著提高。该方法为航空发动机叶片前后缘的高精度、高效率抛光提供了理论和技术支持。

{"title":"Research on polishing trajectory planning method for leading/trailing edge based on polishing removal model of counter torus flexible tool","authors":"Zhang Yun , An Di , Ye Huan , Chen Zhitong , Cheng Geng , Liu Jingqing","doi":"10.1016/j.precisioneng.2025.11.008","DOIUrl":"10.1016/j.precisioneng.2025.11.008","url":null,"abstract":"<div><div>To address the challenge of collaborative optimization between material removal efficiency and surface consistency caused by non-uniform machining allowances in the polishing of aero-engine blade leading/trailing edges, this paper proposes a trajectory planning method based on a removal model and a counter torus flexible polishing tool. By defining the counter torus flexible tool, a material removal model incorporating parameters such as curvature radius and preload is established through Hertz contact theory and orthogonal experimental data. Based on this model, a tool positioning coordinate system is constructed, and the tool posture is optimized by adjusting the yaw angle and rake angle to establish a trajectory optimization model with the goal of minimizing the average absolute deviation of cutting depth. Experiments show that when machining simple and complex blades with the counter torus flexible tool, the number of tool paths required is 9.8 % and 23.1 % of that of conventional convex tools, respectively. The surface roughness is better than Ra 0.4 μm, and the uniformity of material removal depth at the leading/trailing edges is significantly improved. This method provides theoretical and technical support for high-precision and high-efficiency polishing of aero-engine blade leading/trailing edges.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 986-996"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578685","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-precision construction method for laser tracker measurement network 激光跟踪仪测量网高精度施工方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.013

Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou

Efficient and precise automatic measurement is essential for evaluating the manufacturing accuracy of industrial components. The measurement network composed of multiple laser tracker measurement stations (LTMSs) as the foundation for achieving automated measurement of large-scale industrial components, it is particularly important to improve its measurement accuracy. However, the measurement accuracy of the measurement network, which is constructed according to the existing methods, often deviates from its optimal state. To address this, a high-precision construction method for laser tracker measurement network is developed. Firstly, the weight coefficient matrix based on the measurement errors of enhanced reference system points and the iterative optimization algorithm are used to improve the accuracy of the transformation parameters between adjacent LTMSs. Secondly, the optimal number of LTMSs is determined based on the principle of minimizing overall measurement errors for any two measurement points. Finally, the spatial position of each LTMS is optimized according to the principle of minimum measurement errors. The transformation parameters verification experiment and the simulation measurement experiment prove the effectiveness of the proposed method, which can significantly reduce the transformation errors and the overall measurement errors. The proposed method provides a valuable way for industries to improve the performance of automatic measurement of laser tracker measurement networks in real environment.

高效、精确的自动化测量是评价工业零部件制造精度的关键。由多个激光跟踪测量站（ltms）组成的测量网络作为实现大型工业部件自动化测量的基础，提高其测量精度显得尤为重要。然而，根据现有方法构建的测量网络的测量精度往往偏离其最优状态。针对这一问题，提出了一种高精度激光跟踪仪测量网的构建方法。首先，利用基于增强参考系点测量误差的权系数矩阵和迭代优化算法提高相邻LTMSs之间转换参数的精度；其次，根据任意两个测量点整体测量误差最小的原则确定LTMSs的最优数量；最后，根据最小测量误差原则对各LTMS的空间位置进行优化。变换参数验证实验和仿真测量实验证明了该方法的有效性，可以显著降低变换误差和整体测量误差。该方法为提高激光跟踪仪测量网络在实际环境中的自动测量性能提供了一条有价值的途径。

{"title":"High-precision construction method for laser tracker measurement network","authors":"Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou","doi":"10.1016/j.precisioneng.2025.11.013","DOIUrl":"10.1016/j.precisioneng.2025.11.013","url":null,"abstract":"<div><div>Efficient and precise automatic measurement is essential for evaluating the manufacturing accuracy of industrial components. The measurement network composed of multiple laser tracker measurement stations (LTMSs) as the foundation for achieving automated measurement of large-scale industrial components, it is particularly important to improve its measurement accuracy. However, the measurement accuracy of the measurement network, which is constructed according to the existing methods, often deviates from its optimal state. To address this, a high-precision construction method for laser tracker measurement network is developed. Firstly, the weight coefficient matrix based on the measurement errors of enhanced reference system points and the iterative optimization algorithm are used to improve the accuracy of the transformation parameters between adjacent LTMSs. Secondly, the optimal number of LTMSs is determined based on the principle of minimizing overall measurement errors for any two measurement points. Finally, the spatial position of each LTMS is optimized according to the principle of minimum measurement errors. The transformation parameters verification experiment and the simulation measurement experiment prove the effectiveness of the proposed method, which can significantly reduce the transformation errors and the overall measurement errors. The proposed method provides a valuable way for industries to improve the performance of automatic measurement of laser tracker measurement networks in real environment.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1006-1018"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Forming mechanism and performance evaluation of ultrasonic vibration-assisted laser melting structured CBN grinding wheel 超声振动辅助激光熔化结构CBN砂轮成形机理及性能评价

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-10-10 DOI: 10.1016/j.precisioneng.2025.10.006

Zhelun Ma , Chi Zhang , Yanchong Gao , Liaoyuan Chen , Changsheng Liu , Tianbiao Yu

The structured grinding wheel being fabricated using additive manufacturing has been a potential method in the past decade. In this paper, ultrasonic vibration-assisted laser melting (UV-LM) was used to fabricate a structured grinding wheel. The introduction of ultrasonic can control the motion and position of the abrasive grain. Firstly, the time-dependent temperature field and flow field in the molten pool were modeled and discussed. The motion of the abrasive grain in the molten pool during the UV-LM process was simulated, and the results showed that the abrasive grains in the molten pool tend to move upward in the UV-LM process. Relative experiments were carried out to prove this phenomenon, showing that the experimental results had a good agreement with the simulation. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the average height of the abrasive grain improved by 21.1 %. Subsequently, the grinding wheel was fabricated via UV-LM technology, and the grinding performance was evaluated. The surface morphology of the fabricated grinding wheel is discussed, and the number of active grains and inter-grain spacing were analyzed. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the number of active grains increases by 143.84 %, the average inter-grain spacing also decreases by 59.85 %; The surface roughness decreases by 42.31 %; The tangential and normal grinding forces were reduced by 36.93 % and 41.82 %, respectively. The surface morphology and grinding force characterization were also discussed. This study can provide significant guidance for the fabrication of structured grinding wheels by additive manufacturing.

近十年来，利用增材制造技术制造结构化砂轮已成为一种很有潜力的方法。本文采用超声振动辅助激光熔化（UV-LM）技术制备了结构砂轮。超声波的引入可以控制磨粒的运动和位置。首先，对熔池内随时间变化的温度场和流场进行了建模和讨论。模拟了UV-LM过程中熔池中磨料颗粒的运动，结果表明，在UV-LM过程中，熔池中磨料颗粒有向上移动的趋势。对这一现象进行了相关实验验证，实验结果与仿真结果吻合较好。当超声振幅从0 μm增加到6.5 μm时，磨粒的平均高度提高了21.1%。随后，采用UV-LM工艺制作了该砂轮，并对其磨削性能进行了评价。讨论了所制备砂轮的表面形貌，分析了活性晶粒数和晶粒间距。当超声振幅从0 μm增加到6.5 μm时，活性晶粒数量增加了143.84%，平均晶粒间距减小了59.85%；表面粗糙度降低42.31%；切向磨削力和法向磨削力分别减小36.93%和41.82%。讨论了表面形貌和磨削力表征。该研究对采用增材制造技术制造结构砂轮具有重要的指导意义。

{"title":"Forming mechanism and performance evaluation of ultrasonic vibration-assisted laser melting structured CBN grinding wheel","authors":"Zhelun Ma , Chi Zhang , Yanchong Gao , Liaoyuan Chen , Changsheng Liu , Tianbiao Yu","doi":"10.1016/j.precisioneng.2025.10.006","DOIUrl":"10.1016/j.precisioneng.2025.10.006","url":null,"abstract":"<div><div>The structured grinding wheel being fabricated using additive manufacturing has been a potential method in the past decade. In this paper, ultrasonic vibration-assisted laser melting (UV-LM) was used to fabricate a structured grinding wheel. The introduction of ultrasonic can control the motion and position of the abrasive grain. Firstly, the time-dependent temperature field and flow field in the molten pool were modeled and discussed. The motion of the abrasive grain in the molten pool during the UV-LM process was simulated, and the results showed that the abrasive grains in the molten pool tend to move upward in the UV-LM process. Relative experiments were carried out to prove this phenomenon, showing that the experimental results had a good agreement with the simulation. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the average height of the abrasive grain improved by 21.1 %. Subsequently, the grinding wheel was fabricated via UV-LM technology, and the grinding performance was evaluated. The surface morphology of the fabricated grinding wheel is discussed, and the number of active grains and inter-grain spacing were analyzed. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the number of active grains increases by 143.84 %, the average inter-grain spacing also decreases by 59.85 %; The surface roughness decreases by 42.31 %; The tangential and normal grinding forces were reduced by 36.93 % and 41.82 %, respectively. The surface morphology and grinding force characterization were also discussed. This study can provide significant guidance for the fabrication of structured grinding wheels by additive manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 465-477"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Manufacturing processes for microscale metallic hollow structures: numerical investigation and analysis 微尺度金属空心结构制造工艺：数值研究与分析

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-09-09 DOI: 10.1016/j.precisioneng.2025.09.006

Ningqian Tang , Wanfei Ren , Jinkai Xu , Zhaoqiang Zou , Peng Yu , Lei Feng

Hollow metallic structures exhibit extensive applications in the fields of lightweight and energy storage. Nevertheless, fabricating reliable and durable hollow structures at sub-100 μm scales remains challenging. To gain deeper insights into the experimental parameters of hollow structures fabricated via meniscus-confined electrodeposition (MCED), we employed finite element simulation software to numerically model and analyzed the deposition process. This study investigated the influence of parameters, voltage, environmental humidity, and microglass tube diameter, on the formation of hollow structures, thereby guiding subsequent experimental designs. Finally, by applying high voltage, low ambient humidity, and larger microglass tube diameters, the feasibility of directly manufacturing hollow structures smaller than 100 μm in a single step was confirmed using MCED technology. The findings will facilitate the extension of this technique to the deposition of other advanced materials exhibiting tailored microstructures and properties, rendering it highly suitable for diverse applications in fields including aerospace and automotive industries.

空心金属结构在轻量化和储能领域有着广泛的应用。然而，在100 μm以下的尺度上制造可靠耐用的空心结构仍然具有挑战性。为了更深入地了解半月板受限电沉积中空结构的实验参数，我们采用有限元模拟软件对沉积过程进行了数值模拟和分析。本研究考察了电压、环境湿度、微玻璃管直径等参数对空心结构形成的影响，从而指导后续的实验设计。最后，通过施加高电压、低环境湿度和更大的微玻璃管直径，证实了利用MCED技术单步直接制造小于100 μm中空结构的可行性。这一发现将有助于将该技术扩展到其他具有定制微结构和性能的先进材料的沉积，使其非常适合于包括航空航天和汽车工业在内的各种领域的应用。

{"title":"Manufacturing processes for microscale metallic hollow structures: numerical investigation and analysis","authors":"Ningqian Tang , Wanfei Ren , Jinkai Xu , Zhaoqiang Zou , Peng Yu , Lei Feng","doi":"10.1016/j.precisioneng.2025.09.006","DOIUrl":"10.1016/j.precisioneng.2025.09.006","url":null,"abstract":"<div><div>Hollow metallic structures exhibit extensive applications in the fields of lightweight and energy storage. Nevertheless, fabricating reliable and durable hollow structures at sub-100 μm scales remains challenging. To gain deeper insights into the experimental parameters of hollow structures fabricated via meniscus-confined electrodeposition (MCED), we employed finite element simulation software to numerically model and analyzed the deposition process. This study investigated the influence of parameters, voltage, environmental humidity, and microglass tube diameter, on the formation of hollow structures, thereby guiding subsequent experimental designs. Finally, by applying high voltage, low ambient humidity, and larger microglass tube diameters, the feasibility of directly manufacturing hollow structures smaller than 100 μm in a single step was confirmed using MCED technology. The findings will facilitate the extension of this technique to the deposition of other advanced materials exhibiting tailored microstructures and properties, rendering it highly suitable for diverse applications in fields including aerospace and automotive industries.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 95-108"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145049784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Algorithm for sensor nonlinearity compensation in measurements of geometric deviations of rotating elements with variable diameter 变直径旋转元件几何偏差测量中传感器非线性补偿算法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-09-16 DOI: 10.1016/j.precisioneng.2025.09.011

Dariusz Janecki, Krzysztof Stepien

In the area of mechanical engineering, rotating components are not always nominally cylindrical. Sometimes, we also deal with rotating parts with variable diameters. Examples of such parts are rolling elements of bearings shaped like barrels or cones. In industrial practice, rotating components with tight dimensional tolerances are usually measured with the so-called radius-change measuring instruments. The analysis of the measurement of nominally noncylindrical elements showed that the nonlinear characteristics of the measuring sensor have a significant impact on the measurement accuracy. Taking this into account, the authors developed the concept of compensation of the nonlinear characteristics of the sensor in radius-change measuring instruments. The work contains a theoretical description of the concept developed and the results of its experimental verification.

在机械工程领域，旋转部件在名义上并不总是圆柱形的。有时，我们也处理具有变直径的旋转部件。此类部件的例子是形状像桶或锥的轴承的滚动元件。在工业实践中，具有严格尺寸公差的旋转部件通常使用所谓的半径变化测量仪进行测量。对名义非圆柱形元件的测量分析表明，测量传感器的非线性特性对测量精度有很大影响。考虑到这一点，作者提出了补偿半径变化测量仪器中传感器非线性特性的概念。这项工作包括对所发展的概念的理论描述及其实验验证的结果。

引用次数: 0

A Dual-strategic Adaptive Switching method for high-accuracy speed regulation in piezoelectric stepping motor 压电步进电机高精度调速的双策略自适应开关方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-10-08 DOI: 10.1016/j.precisioneng.2025.10.003

Yixiao Yang , Yang Xu , Xuchen Wang , Xiaofeng Yang , Yuping Liu

Piezoelectric stepping motors (PSMs) are widely employed in ultra-precision nanopositioning applications, where highly accurate speed regulation is paramount. However, traditional Frequency-Controlled Speed Regulation (FSR) methods are constrained by their inability to compensate for frequency-related nonlinearities. Furthermore, a pronounced stair-step output emerges in the low-speed range, further degrading positioning performance. To overcome these limitations, this paper introduces a Dual-Strategic Adaptive Switching (DAS) method for PSM speed regulation. The DAS method is underpinned by a modified velocity formula that accounts for these nonlinearities. In the standard speed range, an Improved Frequency-Controlled Speed Regulation (IFSR) method is employed, compensating for frequency-related nonlinearities via a phenomenological model. As the target speed decreases into the low-speed range, the system seamlessly transitions to an Improved Step-Controlled Speed Regulation (ISSR) method. The ISSR method mitigates nonlinearities in the step length-Shear Stack Voltage (SSV) relationship using a polynomial model. A switching criterion ensures a smooth transition between the IFSR and ISSR methods. Experimental results demonstrate that the DAS method significantly enhances speed regulation accuracy compared to the traditional FSR method, reducing real-time positioning errors by 2.1% to 6.0%. The proposed DAS method effectively addresses the speed regulation requirements of the PSM across its entire operational speed range.

压电步进电机广泛应用于超精密纳米定位中，高精度的调速是至关重要的。然而，传统的频率控制调速（FSR）方法由于无法补偿与频率相关的非线性而受到限制。此外，在低速范围内出现明显的阶梯输出，进一步降低了定位性能。为了克服这些限制，本文引入了一种双策略自适应开关（DAS）方法用于PSM调速。DAS方法的基础是一个修正的速度公式，该公式解释了这些非线性。在标准转速范围内，采用改进的频控调速（IFSR）方法，通过现象学模型补偿频率相关的非线性。当目标速度降低到低速范围时，系统无缝过渡到改进的步控调速（ISSR）方法。ISSR方法利用多项式模型减轻了步长-剪切叠加电压（SSV）关系的非线性。切换准则确保了IFSR和ISSR方法之间的平滑过渡。实验结果表明，与传统FSR方法相比，DAS方法显著提高了调速精度，将实时定位误差降低了2.1% ~ 6.0%。所提出的DAS方法有效地解决了PSM在整个运行速度范围内的调速要求。

{"title":"A Dual-strategic Adaptive Switching method for high-accuracy speed regulation in piezoelectric stepping motor","authors":"Yixiao Yang , Yang Xu , Xuchen Wang , Xiaofeng Yang , Yuping Liu","doi":"10.1016/j.precisioneng.2025.10.003","DOIUrl":"10.1016/j.precisioneng.2025.10.003","url":null,"abstract":"<div><div>Piezoelectric stepping motors (PSMs) are widely employed in ultra-precision nanopositioning applications, where highly accurate speed regulation is paramount. However, traditional Frequency-Controlled Speed Regulation (FSR) methods are constrained by their inability to compensate for frequency-related nonlinearities. Furthermore, a pronounced stair-step output emerges in the low-speed range, further degrading positioning performance. To overcome these limitations, this paper introduces a Dual-Strategic Adaptive Switching (DAS) method for PSM speed regulation. The DAS method is underpinned by a modified velocity formula that accounts for these nonlinearities. In the standard speed range, an Improved Frequency-Controlled Speed Regulation (IFSR) method is employed, compensating for frequency-related nonlinearities via a phenomenological model. As the target speed decreases into the low-speed range, the system seamlessly transitions to an Improved Step-Controlled Speed Regulation (ISSR) method. The ISSR method mitigates nonlinearities in the step length-Shear Stack Voltage (SSV) relationship using a polynomial model. A switching criterion ensures a smooth transition between the IFSR and ISSR methods. Experimental results demonstrate that the DAS method significantly enhances speed regulation accuracy compared to the traditional FSR method, reducing real-time positioning errors by 2.1% to 6.0%. The proposed DAS method effectively addresses the speed regulation requirements of the PSM across its entire operational speed range.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 559-571"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hough transform guided subpixel edge regression for high precision relocalization of nut geometric parameters Hough变换引导下的亚像素边缘回归用于螺母几何参数的高精度再定位

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-10-11 DOI: 10.1016/j.precisioneng.2025.10.010

Chang Ding , Jie Zhang , Zhonghua Hu , Haidong Zhu , Zhendong Luo

This study addresses the challenge of multiple geometric dimension measurement of nut based on a dual-position opto-electronic imaging platform, and the hardware's core function lies in the rapid acquisition of image information, while the software primarily provides high-precision image measurement algorithms. This study proposes a series of algorithms including preprocessing for noise elimination and illumination improvement, integer edge point extraction, sub-pixel edge point extraction, and Hough Transform-guided sub-pixel edge point-based line segment and ellipse relocation—a decisive algorithm for high-precision measurement—along with a geometric parameter calculation model. These innovations collectively enable the computation of four key metrics: Opposite Side Distance Range (OSDR), Thickness Range (TR), Thread Diameter Range (TDR), and Least Diagonal Distance (LDD). The developed optoelectronic instrument achieved an average measurement accuracy of 0.05 mm due to a 97 % confidence level from M5 to M16 nut specifications. Meanwhile, the instrument's two primary evaluation metrics—Standard Deviation of Machine Measurement (SDMM) and Standard Deviation of Measurement Error (SDME)—are 0.007 mm and 0.020 mm respectively, reflecting its stability and reliability. Extensive experimental testing and statistical analysis across various specifications and measurement standards have demonstrated that the geometric parameter relocation method based on sub-pixel edge point regression is a critical pathway for achieving high-precision measurement.

本研究解决了基于双位置光电成像平台的螺母多重几何尺寸测量难题，硬件的核心功能在于快速获取图像信息，软件主要提供高精度的图像测量算法。本研究提出了消除噪声和改善光照的预处理、整数边缘点提取、亚像素边缘点提取、Hough变换引导的基于亚像素边缘点的线段和椭圆重定位（高精度测量的决定性算法）等一系列算法，并建立了几何参数计算模型。这些创新共同实现了四个关键指标的计算：对侧距离范围（OSDR）、厚度范围（TR）、螺纹直径范围（TDR）和最小对角线距离（LDD）。由于从M5到M16螺母规格的97%置信度，开发的光电仪器实现了0.05 mm的平均测量精度。同时，仪器的两个主要评价指标——机器测量标准差（SDMM）和测量误差标准差（SDME）分别为0.007 mm和0.020 mm，反映了仪器的稳定性和可靠性。各种规格和测量标准的大量实验测试和统计分析表明，基于亚像素边缘点回归的几何参数重定位方法是实现高精度测量的关键途径。

{"title":"Hough transform guided subpixel edge regression for high precision relocalization of nut geometric parameters","authors":"Chang Ding , Jie Zhang , Zhonghua Hu , Haidong Zhu , Zhendong Luo","doi":"10.1016/j.precisioneng.2025.10.010","DOIUrl":"10.1016/j.precisioneng.2025.10.010","url":null,"abstract":"<div><div>This study addresses the challenge of multiple geometric dimension measurement of nut based on a dual-position opto-electronic imaging platform, and the hardware's core function lies in the rapid acquisition of image information, while the software primarily provides high-precision image measurement algorithms. This study proposes a series of algorithms including preprocessing for noise elimination and illumination improvement, integer edge point extraction, sub-pixel edge point extraction, and Hough Transform-guided sub-pixel edge point-based line segment and ellipse relocation—a decisive algorithm for high-precision measurement—along with a geometric parameter calculation model. These innovations collectively enable the computation of four key metrics: Opposite Side Distance Range (<em>OSDR</em>), Thickness Range (<em>TR</em>), Thread Diameter Range (<em>TDR</em>), and Least Diagonal Distance (<em>LDD</em>). The developed optoelectronic instrument achieved an average measurement accuracy of 0.05 mm due to a 97 % confidence level from M5 to M16 nut specifications. Meanwhile, the instrument's two primary evaluation metrics—Standard Deviation of Machine Measurement (<em>SDMM</em>) and Standard Deviation of Measurement Error (<em>SDME</em>)—are 0.007 mm and 0.020 mm respectively, reflecting its stability and reliability. Extensive experimental testing and statistical analysis across various specifications and measurement standards have demonstrated that the geometric parameter relocation method based on sub-pixel edge point regression is a critical pathway for achieving high-precision measurement.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 527-546"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Voice coil motor-actuated fast tool servo based on adaptive robust control with cutting force compensation for diamond turning 基于自适应鲁棒控制和切削力补偿的音圈电机驱动快速刀具伺服

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-11-01 DOI: 10.1016/j.precisioneng.2025.10.022

Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen

The voice coil motor-actuated fast tool servo (VCM-FTS) is capable of fabricating micro-structured surfaces with ultra-high precision and is widely employed in industrial applications. However, owing to the inherent low axial stiffness of such a system, it is highly susceptible to disturbances caused by cutting forces, resulting in relatively poor machining accuracy. Additionally, parameter variations during machining, such as fluctuations in the force constant of the VCM, can lead to trajectory tracking errors. To address these issues, this paper presents a VCM-FTS controlled by a cutting force compensation-based adaptive robust control (CFC-ARC) controller. Based on prior knowledge of the relationship between the cutting force and uncut chip area from planner trial cutting, the cutting force can be estimated through the ideal uncut chip area and then used as a feedforward term to mitigate disturbances caused by cutting forces. Furthermore, due to the intrinsic properties of ARC, the controller can adjust the system parameters in real time to handle undesired parameter variations. Compared with the traditional controlling method, the adaptation of the CFC-ARC controller improves the system’s positioning resolution, bandwidth and the sinusoidal trajectory tracking accuracy. In the machining of aspheric lens arrays and compound-eye lens arrays, the CFC-ARC controller reduced morphology errors by approximately 30%–45%, confirming its effectiveness in enhancing the machining precision of microstructured surfaces.

音圈电机驱动的快速刀具伺服（VCM-FTS）具有高精度加工微结构表面的能力，在工业上得到了广泛的应用。然而，由于这种系统固有的低轴向刚度，它很容易受到切削力的干扰，导致加工精度相对较差。此外，加工过程中的参数变化，如VCM力常数的波动，可能导致轨迹跟踪误差。为了解决这些问题，本文提出了一种基于切削力补偿的自适应鲁棒控制（CFC-ARC）控制器控制的VCM-FTS。基于规划试切中对切削力与未切削切屑面积关系的先验知识，通过理想的未切削切屑面积估算出切削力，并将其作为前馈项，以减轻切削力引起的干扰。此外，由于电弧的固有特性，控制器可以实时调整系统参数以处理不期望的参数变化。与传统的控制方法相比，CFC-ARC控制器的自适应提高了系统的定位分辨率、带宽和正弦轨迹跟踪精度。在非球面透镜阵列和复眼透镜阵列的加工中，CFC-ARC控制器将形貌误差降低了约30% ~ 45%，证实了其在提高微结构表面加工精度方面的有效性。

{"title":"Voice coil motor-actuated fast tool servo based on adaptive robust control with cutting force compensation for diamond turning","authors":"Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen","doi":"10.1016/j.precisioneng.2025.10.022","DOIUrl":"10.1016/j.precisioneng.2025.10.022","url":null,"abstract":"<div><div>The voice coil motor-actuated fast tool servo (VCM-FTS) is capable of fabricating micro-structured surfaces with ultra-high precision and is widely employed in industrial applications. However, owing to the inherent low axial stiffness of such a system, it is highly susceptible to disturbances caused by cutting forces, resulting in relatively poor machining accuracy. Additionally, parameter variations during machining, such as fluctuations in the force constant of the VCM, can lead to trajectory tracking errors. To address these issues, this paper presents a VCM-FTS controlled by a cutting force compensation-based adaptive robust control (CFC-ARC) controller. Based on prior knowledge of the relationship between the cutting force and uncut chip area from planner trial cutting, the cutting force can be estimated through the ideal uncut chip area and then used as a feedforward term to mitigate disturbances caused by cutting forces. Furthermore, due to the intrinsic properties of ARC, the controller can adjust the system parameters in real time to handle undesired parameter variations. Compared with the traditional controlling method, the adaptation of the CFC-ARC controller improves the system’s positioning resolution, bandwidth and the sinusoidal trajectory tracking accuracy. In the machining of aspheric lens arrays and compound-eye lens arrays, the CFC-ARC controller reduced morphology errors by approximately 30%–45%, confirming its effectiveness in enhancing the machining precision of microstructured surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 767-776"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0