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Real-time capable feedrate optimization for laser processes with redundant axes via two-stage regularized linear programming 基于两阶段正则线性规划的冗余轴激光加工的实时进给优化
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-12-01 Epub Date: 2025-10-21 DOI: 10.1016/j.ijmachtools.2025.104342
Haijia Xu , Daniel Kurth , Christoph Hinze , Claudius Horsch , David Hecht , Alexander Verl
Galvanometer scanners offer high dynamics and precision for laser processes, but are limited in their workspace. To expand the workspace, the galvanometer scanner can be integrated into a larger mechanical motion system with redundant axes, including slow mechanical axes and fast scanner axes. While this configuration provides additional degrees of freedom in feedrate planning, conventional Computerized Numerical Control (CNC)-based laser machining systems cannot exploit them effectively, resulting in suboptimal finishing times. This paper introduces the first real-time capable, optimization-based approach to the minimum-time planning problem under motion redundancy, considering limits in redundant axes and toolpath dynamics up to the third order. This is achieved by decoupling the nonlinear problem into two linear problems and introducing a sequential windowing and adaptive scaling strategy, which allows the toolpath to be scaled to arbitrary lengths. Additionally, a new numerical approximation of the transformation between axis and Cartesian coordinates is introduced. This allows for optimization without arc-length parameterization and simplifies the previous toolpath geometry processing. The constraint feasibility and computational efficiency of the proposed optimization method are validated using spline toolpaths. On a desktop PC with single-core execution, the computation time remains well below the actual processing time at around 10 %, showing linear scalability with respect to toolpath length. Experiments on two different laser machines equipped with redundant axes further validate the planning performance and computational robustness when following freeform contours with up to 10000 constraint checkpoints. Compared to an industrial CNC-guided solution based on S-curve motion profiles, the proposed optimization algorithm reduces the finishing time by around 30 % in experiments with and without jerk constraints.
振镜扫描仪为激光加工提供高动态和精度,但其工作空间有限。为了扩大工作空间,振镜扫描仪可以集成到一个更大的具有冗余轴的机械运动系统中,包括慢速机械轴和快速扫描轴。虽然这种配置为进给速度规划提供了额外的自由度,但传统的基于计算机数控(CNC)的激光加工系统无法有效地利用它们,从而导致次优的精加工时间。本文介绍了第一个实时的,基于优化的方法来解决运动冗余下的最小时间规划问题,考虑了冗余轴和三阶刀具轨迹动力学的限制。这是通过将非线性问题解耦为两个线性问题并引入顺序窗口和自适应缩放策略来实现的,该策略允许将刀具路径缩放到任意长度。此外,还引入了一种新的轴与笛卡尔坐标之间变换的数值近似。这允许在没有弧长参数化的情况下进行优化,并简化了以前的刀具路径几何处理。利用样条刀具轨迹验证了所提优化方法约束的可行性和计算效率。在单核执行的桌面PC上,计算时间保持在10%左右,远低于实际处理时间,显示出与工具路径长度相关的线性可伸缩性。在配备冗余轴的两台不同激光机上的实验进一步验证了该算法在跟踪具有多达10000个约束检查点的自由曲面轮廓时的规划性能和计算鲁棒性。与基于s曲线运动轮廓的工业cnc指导解决方案相比,该优化算法在有和没有抽搐约束的实验中可将加工时间缩短约30%。
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引用次数: 0
Insights into the strengthening mechanisms of titanium alloy treated by electropulsing-assisted ultrasonic nanocrystal surface modification: Process, microstructure, and deformation behavior 电脉冲辅助超声纳米晶表面改性对钛合金强化机理的研究:工艺、微观结构和变形行为
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-12-01 Epub Date: 2025-10-27 DOI: 10.1016/j.ijmachtools.2025.104343
Yu Zhang , Weidong Zhao , Yixuan Ye , Xiao Jia , Yalin Dong , Han Ding , Jian Wang , Chang Ye
Ultrasonic nanocrystal surface modification (UNSM) properly improves fatigue resistance but shows limited processing efficiency on hard-to-deform alloys such as Ti6Al4V due to their high deformation resistance. This study employs an emerging electropulsing-assisted UNSM (EP-UNSM) approach that integrates pulsed current with conventional UNSM to improve strengthening efficiency and associated surface integrity. However, strain localization-induced nanocrystalline plastic instability may lead to fatigue deterioration under low cycle fatigue regimes. To clarify these aspects, systematic microstructure characterization and mechanical testing were conducted to determine the pathways by which EP-UNSM alters plastic deformation and fatigue strengthening mechanisms. Results reveal that, unlike the planar dislocation slip induced by limited plastic deformation in conventional UNSM, EP-UNSM activates pronounced non-basal dislocations and wavy slip patterns, thereby improving the plasticity and producing a deeper gradient nanostructure layer. Moreover, a dynamic electro-annealing mechanism is proposed that involves the synergistic reconfiguration of metastable dislocations and nanocrystals, forming periodic dislocation cells in EP-UNSM samples, in contrast to the sharp triple-junction grain boundaries observed in conventional UNSM. This microstructure evolution mitigates stress concentration at grain boundaries and enhances compressive residual stress stability, ultimately improving fatigue resistance across all stress regimes. These findings advance understanding of electropulsing-assisted deformation and guide anti-fatigue manufacturing strategies for titanium alloys and other hard-to-deform metals.
超声纳米晶表面改性(UNSM)可有效提高Ti6Al4V等难变形合金的抗疲劳性能,但由于其高抗变形能力,其加工效率有限。本研究采用了一种新兴的电脉冲辅助UNSM (EP-UNSM)方法,该方法将脉冲电流与传统的UNSM相结合,以提高强化效率和相关的表面完整性。然而,应变局部化引起的纳米晶塑性失稳可能导致低周疲劳状态下的疲劳恶化。为了阐明这些方面,进行了系统的微观结构表征和力学测试,以确定EP-UNSM改变塑性变形和疲劳强化机制的途径。结果表明,EP-UNSM与常规UNSM中有限塑性变形引起的平面位错滑移不同,EP-UNSM激活了明显的非基底位错和波状滑移模式,从而提高了塑性并产生了更深的梯度纳米结构层。此外,本文还提出了一种动态电退火机制,该机制涉及亚稳位错和纳米晶体的协同重配置,在EP-UNSM样品中形成周期性位错细胞,而不是传统UNSM中观察到的尖锐的三重结晶界。这种微观结构的演变减轻了晶界的应力集中,增强了压残余应力的稳定性,最终提高了所有应力状态下的抗疲劳能力。这些发现促进了对电脉冲辅助变形的理解,并指导了钛合金和其他难变形金属的抗疲劳制造策略。
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引用次数: 0
A novel in-situ field-assisted powder bed laser fusion using liquid metal enabling microstructure control and strength enhancement of austenitic steel 一种利用液态金属的原位场辅助粉末床激光熔合,可控制奥氏体钢的显微组织并提高其强度
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-11-01 Epub Date: 2025-09-06 DOI: 10.1016/j.ijmachtools.2025.104334
Xiaoyu Liang , Yurong Wang , Wei Liu , Buwei Xiao , Qingze Liu , Yizhuo Sun , Pengcheng Lv , Huabei Peng , Jun Zhou , Lei Zhang , Feng Lin
The layer-by-layer powder bed additive manufacturing approach, which encapsulates the workpiece in powder during processing, imposes limitations on the integration of in-situ field assistance and enhances production costs. In this work, a novel laser powder bed fusion has been proposed in which the layer-wise accumulated powder bed is replaced by a thin powder layer floating on the liquid Sn. Such a liquid-metal-assisted laser powder bed fusion presents unique advantages: the characteristic thermal history of deposited materials due to high thermal conductivity and fluidity of liquid metals provides greater possibilities for microstructure modulation; the recyclable liquid metal also reduces the need for powder in the forming cylinder and reduces the number of times the powder is reused. Based on the normalized process diagram of liquid-metal-assisted laser powder bed fusion, forming experiments were carried out on the austenitic stainless steels, and the mechanisms underlying the regulation of fine-grain regions were investigated, along with an analysis of the microstructure of this region. Results indicated that the high cooling rate during liquid-metal-assisted laser powder bed fusion led to a finer microstructure and a heterogeneous grain structure ranging from submicron to micron scales in the austenitic stainless steels. The formed heterogeneous austenitic steel exhibits a yield strength surpassing 1.1 GPa and a tensile strength of 1.5 GPa, while retaining an average uniform elongation of 7 %. The in-situ heat treatment principles using liquid metal demonstrated in this work have significant applicability across various additive manufacturing processes and precipitation-hardening alloys.
逐层粉末床增材制造方法在加工过程中将工件封装在粉末中,这限制了现场辅助的集成,并提高了生产成本。本文提出了一种新型的激光粉末床熔合方法,即用悬浮在液态锡上的薄粉末层代替分层堆积的粉末床。这种液体金属辅助激光粉末床熔融具有独特的优势:由于液态金属的高导热性和流动性,沉积材料的特征热历史为微观结构调制提供了更大的可能性;可回收的液态金属还减少了成形气缸对粉末的需求,减少了粉末的重复使用次数。基于液体金属辅助激光粉末床熔合的归一化工艺图,对奥氏体不锈钢进行了成形实验,探讨了细晶区调控的机理,并对该区域的显微组织进行了分析。结果表明,液体金属辅助激光粉末床熔合过程中,高冷却速率使奥氏体不锈钢的显微组织更细,晶粒结构在亚微米到微米之间。形成的非均相奥氏体钢屈服强度超过1.1 GPa,抗拉强度达到1.5 GPa,同时保持7%的平均均匀伸长率。在这项工作中证明的使用液态金属的原位热处理原理在各种增材制造工艺和沉淀硬化合金中具有重要的适用性。
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引用次数: 0
The typical cellular microstructures developed in powder-based additively manufactured metallic materials: formation mechanisms, properties, outlooks and challenges 粉末基增材制造金属材料中典型的细胞微结构:形成机制、性能、前景和挑战
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-11-01 Epub Date: 2025-09-05 DOI: 10.1016/j.ijmachtools.2025.104332
Jianying Wang , Heng Li , M.W. Fu
Cellular microstructures are intrinsically associated with the printability and mechanical-functional performance of laser-additively manufactured metallic materials. An in-depth understanding of formation mechanisms under extreme processing conditions and impacts on mechanical-functional performance remains critical to improving the application prospects of laser additive manufacturing. In this paper, vital insights into the characteristics, formation mechanisms, mechanical-functional performance, and prospects of cellular microstructures are orchestrated and articulated. First, the differences between dislocation cellular microstructures obtained from conventional methods and those induced by additive manufacturing are summarised through a comparative analysis. Based on the diverse environments of sub-boundaries, almost all cellular microstructures in metallic materials are then exemplified and classified into three categories: dislocation-formed cellular microstructures, both with and without elemental segregation, and eutectic-formed cellular microstructures. For each category, its formation mechanisms related to analysis approaches and evaluation of mechanical-functional performance are delineated and discussed in detail. Finally, insights into the formation mechanisms, model development, thermal stability of cellular microstructures, and countermeasures for aspects of their negative influence on printability and performance are presented. Collectively, this systematic review of cellular microstructures provides a foundational framework to guide the design, manufacture, and industrial-scale implementation of high-performance metallic components.
细胞微结构与激光增材制造的金属材料的可打印性和机械功能性能有着内在的联系。深入了解极端加工条件下的形成机制及其对机械功能性能的影响对于提高激光增材制造的应用前景至关重要。在本文中,对细胞微结构的特征、形成机制、机械功能性能和前景的重要见解进行了编排和阐述。首先,通过对比分析,总结了传统方法获得的位错细胞微观结构与增材制造方法获得的位错细胞微观结构之间的差异。基于不同的亚边界环境,对金属材料中几乎所有的细胞微结构进行了举例,并将其分为三类:位错形成的细胞微结构(包括元素偏析和不存在元素偏析的细胞微结构)和共晶形成的细胞微结构。对于每个类别,其形成机制与分析方法和评估的机械功能性能进行了详细的描述和讨论。最后,介绍了细胞微结构的形成机制、模型开发、热稳定性以及它们对打印性能和性能的负面影响的对策。总的来说,这种对细胞微结构的系统回顾为指导高性能金属部件的设计、制造和工业规模实施提供了基础框架。
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引用次数: 0
Manufacturing limit and structural scale effect of thin-wall/rod units in lattice structure fabricated by laser powder bed fusion 激光粉末床熔合薄壁/棒晶格结构单元的制造极限及结构规模效应
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-11-01 Epub Date: 2025-08-28 DOI: 10.1016/j.ijmachtools.2025.104323
Qiao Zhong, Mengxiao Jin, Shihao Bie, Liying Meng, Yisong Wang, Kaiwen Wei, Jiapei Liu, Jianqiang Gong, Yu Yang, Anqi Ouyang, Xiangyou Li, Xiaoyan Zeng
The growing maturity of additive manufacturing (AM) technologies, represented by laser powder bed fusion (LPBF), has greatly facilitated the design and manufacturing of lattice structure. However, the process constraints of the minimum features (thin-wall/rod units) in lattice structure remains poorly understood. This study investigated the manufacturing limits and the relevant failure mechanism of thin-wall/rod units fabricated by LPBF. The effects of structural scale (dimension and inclination angle) on surface morphology, microstructure, and mechanical properties were also studied. Results indicate that the failure of thin-wall/rod units at critical dimension and inclination angle was driven by interlayer molten track mismatch and warping effect in cantilever region, respectively. AM process simulations reveal that rod unit exhibit better manufacturability at small inclination angles compared to thin-wall unit, due to less significant stress deformation. A clear dependence of defect behavior, surface morphology and microstructural characteristics on structural scale is identified. A multi-physics model was created to observe the development of down-skin surface quality of the thin-wall units at small inclination angles. Microstructural analysis reveals transitions between super-refined equiaxed grains, millimeter-long columnar grains, and centimeter-long columnar grains at different scale governed by temperature gradient and grain competitive mechanisms. Additionally, a declining tendency in tensile strength is detected with decreasing feature dimension and inclination angle, primarily because the poor side surface quality and higher porosity accelerated crack initiation and propagation. Moreover, two types of lattice structures were fabricated accordingly. Their characterization results confirm the applicability of the new findings from thin-wall/rod unit experiments, providing insights for the efficient manufacturing of lattice structures endowed with excellent performance.
以激光粉末床熔融(LPBF)为代表的增材制造(AM)技术日益成熟,极大地促进了晶格结构的设计和制造。然而,晶格结构中最小特征(薄壁/棒状单元)的工艺约束仍然知之甚少。研究了LPBF薄壁杆件的制造极限及其失效机理。研究了结构尺度(尺寸和倾角)对表面形貌、显微组织和力学性能的影响。结果表明,薄壁/杆单元在临界尺寸和倾斜角度下的失效分别由层间熔迹失配和悬臂区域翘曲效应驱动。增材制造过程模拟表明,与薄壁单元相比,棒材单元在小倾角下具有更好的可制造性,因为应力变形较小。缺陷行为、表面形貌和微观结构特征对结构尺度有明显的依赖性。建立了多物理场模型,观察了小倾角下薄壁单元的下表皮质量的变化。显微组织分析揭示了不同尺度下超细化等轴晶、毫米长柱状晶和厘米长柱状晶之间的转变受温度梯度和晶粒竞争机制的控制。拉伸强度随特征维数和倾角的减小呈下降趋势,主要原因是侧表面质量差、孔隙率高加速了裂纹的萌生和扩展。并据此制作了两种类型的晶格结构。他们的表征结果证实了薄壁/棒单元实验新发现的适用性,为高效制造具有优异性能的晶格结构提供了见解。
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引用次数: 0
Insights into hydrodynamic self-balancing mechanics in adaptive float machining process for nanometric form error control 自适应浮子加工过程中纳米形状误差控制的流体动力自平衡力学研究
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-11-01 Epub Date: 2025-09-10 DOI: 10.1016/j.ijmachtools.2025.104333
Fang Han, Jingyuan Wang, Wei Gao, Shuai Wang, Bingchun Jia, Cao-Yang Xue, Weijian Zhang, Bing-Feng Ju, Wule Zhu
With advances in semiconductor and aerospace industries, the demand for components with atomic and close-to-atomic scale accuracy is paramount. As a non-contact method, float machining is showing great potential for excellent surface finishing, where the adaptive fluid film between the tool and workpiece plays an essential role. However, its dynamic self-balancing mechanics remains unexplored, without revealing which, the outcome of extreme accuracy could be hardly touched or controlled. To address this issue, a hydrodynamic coupling dataset driven hydrodynamic model with in-situ force-position sensing approach is proposed. This work presents the first systematic elucidation of the transient processes governing the fluid film-tool interaction as the system achieves a balancing state. Simulation and experiments were conducted to demonstrate the adaptive film evolution route, and its relation to the specific process conditions with precise prediction. Insights into the intermediate states and inherent self-balancing mechanism enable exceptional form control ability, namely deterministic removal of 3 nm in depth across an arbitrary 3 mm region. Subsequently, a sinusoidal hyperbolic freeform with form error within ±2 nm PV over a 5 mm region was fabricated using only a stepper-motor platform, and the underlying process produces an atomically ordered, damage-free subsurface. Furthermore, the capability for non-uniform machining was verified by fabricating compound-eye structures and correcting curved surfaces to nanometric form accuracy.
随着半导体和航空航天工业的进步,对原子和接近原子尺度精度的组件的需求是至关重要的。浮子加工作为一种非接触式加工方法,在实现表面精加工方面显示出巨大的潜力,其中刀具与工件之间的自适应流体膜起着重要的作用。然而,它的动态自平衡机制仍未被探索,没有揭示其中,极端精度的结果几乎无法触摸或控制。为了解决这一问题,提出了一种基于原位力-位置传感方法的水动力耦合数据集驱动的水动力模型。这项工作提出了第一个系统的阐明瞬态过程控制流体膜-工具的相互作用,因为系统达到了平衡状态。通过仿真和实验验证了自适应膜演化路线,并对其与具体工艺条件的关系进行了精确预测。对中间状态和固有的自平衡机制的深入了解使其具有特殊的形状控制能力,即在任意3mm区域内确定去除3nm深度。随后,仅使用步进电机平台就可以在5mm区域内制造出形状误差在±2nm PV内的正弦双曲自由曲面,并且底层工艺产生原子有序,无损伤的亚表面。此外,通过制造复合眼结构和将曲面修正到纳米形状精度,验证了非均匀加工的能力。
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引用次数: 0
Understanding the surface polishability and hardness-softening mechanisms of martensitic mould steel in multi-mode nanosecond laser polishing 了解马氏体模具钢在多模纳秒激光抛光中的表面可抛光性和硬度软化机理
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-10-01 Epub Date: 2025-07-25 DOI: 10.1016/j.ijmachtools.2025.104311
Erju Liu , Donghe Zhang , La Han , Zhikun Liu , Debin Shan , Bin Guo , Jie Xu
Laser polishing is an efficient, reliable, and environmentally friendly surface-finishing technique aimed at improving the surface quality. However, its application to martensitic mould steel is limited by surface-softening issues induced by the pronounced thermal effects of conventional continuous-wave laser polishing. This study proposes a multi-mode nanosecond laser polishing approach that employs a millimetre-diameter beam with top-hat energy distribution to mitigate the thermal effects and alleviate surface softening. A key challenge is achieving high-quality polishing at shallow melting depths. Further, the proposed process may alter the surface-softening mechanism when considering the unique phase-transformation behaviour of martensitic mould steel. To clarify these aspects, the characteristics of multi-mode nanosecond laser polishing, related to the process and properties, are investigated via finite-element simulations and experiments. The results demonstrate that, unlike the multi-directional melt flow induced by the intense melt pool reaction in continuous-wave laser polishing, multi-mode nanosecond laser polishing drives long-range horizontal melt flow and simultaneously induces multiple convex peaks to fill concave valleys, thereby achieving high-quality surface smoothing (Sa = 0.23 μm) with a minimal melting depth (<2 μm). Moreover, a novel surface-softening mechanism involving the synergistic induction of residual austenite enrichment (up to 90 %) in the fusion zone and martensite tempering effects in the heat-affected zone is presented, which contrasts with the traditional mechanism that relies solely on tempering-induced softening in the heat-affected zone. This study presents a low-thermal-effect, high-quality, and high-efficiency polishing solution for metal components, while advancing the theoretical understanding of hardness-softening mechanisms in the laser manufacturing of martensitic steel.
激光抛光是一种高效、可靠、环保的表面处理技术,旨在提高表面质量。然而,由于传统连续波激光抛光的明显热效应导致表面软化,限制了其在马氏体模型钢上的应用。本研究提出了一种多模纳秒激光抛光方法,该方法采用直径为毫米的能量顶帽分布光束来减轻热效应和表面软化。一个关键的挑战是在较浅的熔化深度实现高质量的抛光。此外,考虑到马氏体模具钢独特的相变行为,所提出的工艺可能会改变表面软化机制。为了阐明这些方面,通过有限元模拟和实验研究了多模纳秒激光抛光的工艺和性能特征。结果表明,与连续波激光抛光中强烈熔池反应引起的多向熔体流动不同,多模纳秒激光抛光驱动长距离水平熔体流动,同时诱导多个凸峰填充凹谷,从而以最小的熔化深度(<2 μm)实现高质量的表面光滑(Sa = 0.23 μm)。此外,提出了一种新的表面软化机制,该机制涉及熔合区残余奥氏体富集(高达90%)和热影响区马氏体回火效应的协同诱导,这与传统的仅依赖回火诱导热影响区的软化机制形成了对比。本研究提出了一种低热效应、高质量、高效率的金属零件抛光解决方案,同时推进了对马氏体钢激光加工硬度-软化机理的理论认识。
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引用次数: 0
Review of physicochemical-assisted nanomanufacturing processes for wide-bandgap semiconductor wafers 宽禁带半导体晶圆的物理化学辅助纳米制造技术综述
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-10-01 Epub Date: 2025-08-12 DOI: 10.1016/j.ijmachtools.2025.104321
Kazuya Yamamura , Hui Deng , Yasuhisa Sano , Junji Murata , Xu Yang , Rongyan Sun
Nanomanufacturing involves not only fabricating nanoscale three-dimensional microstructures but also achieving nanoscale surface planarization and smoothing—an indispensable requirement in semiconductor-wafer processing. Wide-bandgap semiconductors such as SiC, GaN, diamond, and AlN combine high hardness, brittleness, and chemical inertness, making it exceptionally difficult to produce large size wafers with damage-free, atomic-level smoothness that meets the performance demands of next-generation devices. Physical–chemical composite methods, which marry the high-efficiency planarization of mechanical removal with the damage-free of chemical reactions, have emerged as the most promising route to overcome this challenge. Chemical mechanical polishing (CMP), the first-generation composite technique, was well established in industry; however, its low material removal rates, extensive consumable use, and environmental burden were increasingly problematic as wafer sizes grow and new wide-bandgap materials become mainstream. This review surveys the principal physicochemical processing techniques and examines four representative approaches—plasma-assisted polishing (PAP), plasma-based atomic-selective etching (PASE), catalyst-assisted etching (CARE), and electrochemical mechanical polishing (ECMP). A systematic comparison of their mechanisms, advantages, and limitations clarifies how these methods maintain crystal integrity while enabling selective material removal, thereby delivering atomically smooth surfaces with significantly higher throughput. The review provides both theoretical insight and practical guidance for cost-effective, atomically precise processing of wide-bandgap semiconductor wafers.
纳米制造不仅涉及制造纳米级三维微结构,还涉及实现纳米级表面平面化和光滑化,这是半导体晶圆加工中不可或缺的要求。宽带隙半导体,如SiC、GaN、金刚石和AlN,结合了高硬度、脆性和化学惰性,使得生产具有无损伤、原子级光滑度的大尺寸晶圆,满足下一代器件的性能要求,变得异常困难。物理化学复合方法结合了机械去除的高效率平面化和化学反应的无损伤性,已经成为克服这一挑战的最有希望的途径。化学机械抛光(CMP)是第一代复合材料技术,在工业上已经得到了很好的应用;然而,随着晶圆尺寸的增长和新型宽带隙材料的主流化,其材料去除率低、耗材广泛以及环境负担日益成为问题。本文综述了主要的物理化学加工技术,并研究了四种具有代表性的方法——等离子体辅助抛光(PAP)、等离子体基原子选择性蚀刻(PASE)、催化剂辅助蚀刻(CARE)和电化学机械抛光(ECMP)。系统地比较了它们的机制、优点和局限性,阐明了这些方法如何在实现选择性材料去除的同时保持晶体完整性,从而提供具有显着更高吞吐量的原子光滑表面。该综述为低成本、原子精度高的宽禁带半导体晶圆加工提供了理论见解和实践指导。
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引用次数: 0
Derivation of physical equations for high-speed laser welding using large language models 用大语言模型推导高速激光焊接物理方程
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-10-01 Epub Date: 2025-08-20 DOI: 10.1016/j.ijmachtools.2025.104320
Kyubok Lee , Zhengxiao Yu , Zen-Hao Lai , Peihao Geng , Teresa J. Rinker , Changbai Tan , Blair Carlson , Siguang Xu , Jingjing Li
It is challenging to formulate complex physical phenomena that occur in a manufacturing process, particularly when the available data are limited, rendering conventional data-driven approaches ineffective. This study aims to predict humping onset in high-speed laser welding by introducing a novel framework, namely text-to-equations generative pre-trained transformer (T2EGPT). This method leverages the capabilities of large language models (LLMs), in combination with sparse experimental data and enriched literature data, to derive an interpretable and generalizable equation for predicting humping initiation. By capturing key correlations among physical parameters, T2EGPT generates a compact and dimensionless expression that accurately predicts hump formation. The equation reveals that humping arises from the interplay between inertia-driven backward melt flow and capillary-driven surface stabilization, where inertial forces drive molten metal backward and capillary forces resist surface deformation. Compared to traditional data-driven models, T2EGPT demonstrates enhanced predictive accuracy and cross-material transferability. More broadly, this study highlights the potential of LLMs to integrate textual information with data-driven discovery, enabling the extraction of physical laws in data-scarce scientific domains.
对于制造过程中发生的复杂物理现象,特别是在可用数据有限的情况下,传统的数据驱动方法是无效的。本研究旨在通过引入一个新的框架,即文本-方程生成预训练变压器(T2EGPT)来预测高速激光焊接中的驼峰发生。该方法利用大型语言模型(llm)的能力,结合稀疏的实验数据和丰富的文献数据,推导出一个可解释和可推广的预测驼峰起始的方程。通过捕获物理参数之间的关键相关性,T2EGPT生成一个紧凑的无量纲表达式,可以准确预测驼峰的形成。由方程可知,驼峰是由惯性力驱动的熔体向后流动和毛细力驱动的表面稳定相互作用产生的,其中惯性力驱动金属液向后流动,毛细力抑制表面变形。与传统的数据驱动模型相比,T2EGPT具有更高的预测准确性和跨材料可移植性。更广泛地说,这项研究强调了法学硕士将文本信息与数据驱动的发现相结合的潜力,从而能够在数据稀缺的科学领域中提取物理定律。
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引用次数: 0
A novel strategy for electrochemical additive manufacturing: Femtosecond laser-assisted localized electrochemical deposition 电化学增材制造的新策略:飞秒激光辅助局部电化学沉积
IF 18.8 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2025-10-01 Epub Date: 2025-08-08 DOI: 10.1016/j.ijmachtools.2025.104319
Zhaoqiang Zou , Wanfei Ren , Jinkai Xu , Hanhan Wei , Zhanjiang Yu , Ningqian Tang , Huadong Yu
Localized electrochemical deposition (LECD) exhibits significant advantages in fabricating microscale 3D metallic structures. However, conventional LECD technologies are inherently constrained by diffusion-controlled mechanisms, where pursuit of enhanced deposition efficiency inevitably degrades deposition quality (such as increased surface roughness and internal defects), consequently impairing structural mechanical properties. This study presents a femtosecond laser-assisted localized electrochemical deposition (FsLA-LECD) technology. By precisely coupling femtosecond laser irradiation with the electrodeposition microzone and leveraging laser energy to regulate electrodeposition process, this approach simultaneously achieves efficient fabrication of complex metallic microstructures with enhanced mechanical performance. The regulating effects of laser irradiation on mass transfer, nucleation kinetics, and grain growth evolution are investigated throughout the evolution process of point-surface-structure. Experimental and computational analysis elucidate that the laser-induced Marangoni effect within the reaction microenvironment enhances microzone electrolyte replenishment, consequently elevating deposition current density. This results in a volume deposition rate of 15.47 μm3/s, representing a 3 times enhancement over laser-free conditions. Laser-mediated regulation of deposition rates enabled fabrication of uniform-diameter, bamboo-like, and hourglass-shaped microstructures. Furthermore, pulsed laser energy facilitated stepwise current amplification, thereby inducing nanotwin formation within copper micro-geometrical features. This approach attained a tensile yield strength of 1.08 GPa, significantly surpassing that of traditional electrodeposited counterparts. This work demonstrates the capability of FsLA-LECD to simultaneously enable high-efficiency manufacturing and enhanced mechanical properties, establishing the groundwork for innovative approaches to high-performance micromanufacturing.
局部电化学沉积(LECD)在制造微尺度三维金属结构方面具有显著的优势。然而,传统的LECD技术本身就受到扩散控制机制的限制,在这种机制下,追求提高沉积效率不可避免地会降低沉积质量(如增加表面粗糙度和内部缺陷),从而损害结构力学性能。本研究提出了一种飞秒激光辅助定位电化学沉积(FsLA-LECD)技术。该方法通过将飞秒激光照射与电沉积微区精确耦合,利用激光能量调节电沉积过程,同时实现了复杂金属微结构的高效制造,并提高了机械性能。研究了激光辐照对点面结构演化过程中传质、成核动力学和晶粒生长演化的调控作用。实验和计算分析表明,反应微环境中激光诱导的马兰戈尼效应增强了微区电解质的补充,从而提高了沉积电流密度。这导致了15.47 μm3/s的体积沉积速率,比无激光条件下提高了3倍。激光介导的沉积速率调节使直径均匀,竹状和沙漏状微结构的制造成为可能。此外,脉冲激光能量促进了电流的逐步放大,从而在铜的微观几何特征中诱导纳米孪晶的形成。该方法获得了1.08 GPa的抗拉屈服强度,大大超过了传统电沉积的同类材料。这项工作证明了FsLA-LECD同时实现高效率制造和增强机械性能的能力,为高性能微制造的创新方法奠定了基础。
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引用次数: 0
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International Journal of Machine Tools & Manufacture
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