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2nd 1998 IEMT/IMC Symposium (IEEE Cat. No.98EX225)最新文献

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Effects on etching rates of copper in ferric chloride solutions 铜在氯化铁溶液中蚀刻速率的影响
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704541
C. Jian, M. Jusheng, W. Gang-Qiang, T. Xiangyun
The influences of several factors on the etching rates of Cu in FeCl/sub 3/ etchant are studied with a spray etching apparatus in this paper. The Cu etching surfaces are analyzed by XRD, and it is shown that there is a CuCl passivation film on the etching surface. A brief explanation is offered based on the relationship between etching rate and etching time. It indicates that cations influence the etching rate as the effects of different chlorides on etching rates have been studied. Additionally, the quantity of copper dissolved in FeCl/sub 3/ etchant and regeneration of spent etchants are also investigated in this paper.
采用喷雾蚀刻装置,研究了几种因素对FeCl/ sub3 /蚀刻剂中Cu蚀刻速率的影响。用XRD对Cu蚀刻表面进行了分析,发现蚀刻表面有一层CuCl钝化膜。对刻蚀速率与刻蚀时间的关系作了简要说明。研究了不同氯化物对腐蚀速率的影响,表明阳离子对腐蚀速率有影响。此外,本文还对FeCl/ sub3 /蚀刻剂中铜的溶解量和废蚀刻剂的再生进行了研究。
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引用次数: 18
Development of high reliability underfill material 高可靠性下填料的研制
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704517
M. Wada
As an encapsulant for flip chip packages, underfill materials play an important role for the purpose of protection from thermal stress and environmental stress. We have developed an excellent reliability underfill material based on the following concepts: (1) cured underfill material coefficient of thermal expansion (CTE) which is close to that of the solder ball; (2) excellent adhesion to plastic circuit board; (3) little change in material properties after moisture uptake. The material can be cured for 60 min, has JEDEC level 3 reliability and passes 1000 cycle temperature cycling tests. In order to shorten the cure schedule of this material, we have studied the following: (a) an additive agent with hydrophobic structure; (b) a catalyst. Based on these studies, we have developed a shorter cure (30 min.) type underfill.
底填材料作为倒装芯片封装的封装材料,在热应力和环境应力的保护中起着重要的作用。基于以下概念,我们开发了一种可靠性优异的底填材料:(1)固化底填材料的热膨胀系数(CTE)接近焊料球的热膨胀系数;(2)对塑料电路板的附着力极好;(3)吸湿后材料性能变化不大。固化时间60min,具有JEDEC 3级可靠性,通过1000次循环温度循环试验。为了缩短该材料的固化时间,我们研究了以下几种材料:(a)疏水结构的添加剂;(b)催化剂。基于这些研究,我们开发了一种较短的固化(30分钟)型底填料。
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引用次数: 4
An optical coupling technique for parallel optical interconnection modules using polymeric optical waveguide films 利用聚合物光波导薄膜实现平行光互连模块的光耦合技术
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704538
M. Usui, M. Hikita, R. Yoshimura, N. Matsuura, N. Sato, A. Ohki, T. Kagawa, K. Tateno, K. Katsura, Y. Ando
ParaBIT (parallel inter-board optical interconnection technology) is promising for high-throughput interconnections in advanced switching and computer systems. We have developed a new optical coupling technique for ParaBIT modules using polymeric optical waveguide films. This technique provides good optical coupling in ParaBIT modules, and is also very useful for multi-channel optical coupling. In this paper, we describe the design, structure, and characteristics of this optical coupling technique.
平行板间光互连技术(ParaBIT)在高级交换和计算机系统的高吞吐量互连中具有广阔的应用前景。我们开发了一种利用聚合物光波导薄膜的ParaBIT模块光耦合新技术。该技术在ParaBIT模块中提供了良好的光耦合,对于多通道光耦合也非常有用。本文介绍了这种光耦合技术的设计、结构和特点。
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引用次数: 5
An MCM-D module using newly structured thermal management technique 采用新结构热管理技术的MCM-D模块
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704632
N. Yamanaka, A. Harada, K. Kaizu, T. Kawamura
This paper describes a newly developed MCM-D microprocessor module for advanced ATM switching systems. The Si-substrate MCM-D technology, which integrates a Motorola 68030 microprocessor, interface control, and peripheral control custom VLSIs, high-speed SRAMs and FPGAs (field programmable gate arrays), is employed. This is made possible by high density packaging with the stacked high-speed RAM technique, and reduces module size by 7/8 compared to conventional surface mounting schemes. In addition, a uniquely structured thermal management technique is employed. MCM heat flows to the printed motherboard power supply layer through via holes. Using this technique, module volume can be dramatically reduced. This microprocessor module technology and MCM technology has been developed to advance the development of practical B-ISDN ATM switching systems.
本文介绍了一种新开发的用于高级ATM交换系统的MCM-D微处理器模块。采用si衬底MCM-D技术,集成了摩托罗拉68030微处理器、接口控制、外设控制定制vlsi、高速sram和fpga(现场可编程门阵列)。这是通过高密度封装和堆叠高速RAM技术实现的,与传统的表面安装方案相比,模块尺寸减少了7/8。此外,采用了独特的结构热管理技术。MCM热量通过通孔流向印刷主板电源层。使用这种技术,可以大大减少模块的体积。微处理器模块技术和MCM技术的发展促进了实际B-ISDN ATM交换系统的发展。
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引用次数: 0
Development of heat dissipation structure for face-down bonded devices 面向下键合器件散热结构的研制
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704671
K. Nakakuki, Y. Takahashi, Y. Iguchi, K. Anasako, H. Shimamura
We developed a heat dissipation structure for face-down bonded surface acoustic wave (SAW) filter packages. This structure enables compact packages at low cost. Heat dissipation from the transmission (Tx) SAW filter and filter sealing are important factors in enhancing package reliability. Tx and reception (Rx) SAW filters were bonded on a printed wiring board (PWB) with a branching circuit, and the filters were sealed with a metallic lid using conductive adhesive. High thermal conductivity adhesive was used to fill between the Tx SAW filter and the metallic lid, enabling the heat of the Tx SAW filter to be dissipated. The filter properties of the package using this high thermal conductivity adhesive were not changed after 500 hour operation with 5 W input RF signals. Results following the performance of thermal shock tests also confirmed characteristics indicating an extremely tight seal, with a rate of helium leakage of only 10/sup -8/ atm/spl middot/cc/s. Thus, as indicated in detail by these results, we concluded that the structure which we developed has been proven to be suitable for application to SAW filter packages.
我们开发了一种面朝下粘合表面声波(SAW)滤波器封装的散热结构。这种结构可以实现低成本的紧凑封装。传输(Tx)声表面波滤波器的散热和滤波器密封是提高封装可靠性的重要因素。发送和接收(Rx)声表面波滤波器粘接在带有分支电路的印刷线路板(PWB)上,滤波器用导电粘合剂密封在金属盖上。使用高导热性粘合剂填充Tx SAW过滤器和金属盖之间,使Tx SAW过滤器的热量散发出去。使用这种高导热胶粘剂的封装在5w输入射频信号下运行500小时后,其过滤性能没有变化。热冲击测试后的结果也证实了密封非常紧密的特点,氦气泄漏率仅为10/sup -8/ atm/spl / middot/cc/s。因此,正如这些结果所详细指出的那样,我们得出的结论是,我们开发的结构已被证明适用于SAW滤波器封装。
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引用次数: 1
Thermal dynamics and BGA ball reflow 热动力学和BGA球回流
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704516
S.R. Wathne, K. Wathne
Reflow technology has undergone some major changes in recent times. This is largely due to the requirements in the industry to improve process control. Three major factors contribute to achieve this: temperature, time and atmosphere. Not only must each segment be controlled, but it must all be done simultaneously, as each interacts with the other. It is no longer tolerable for one of the ingredients to be held to specifications while the other is not. Current furnaces are therefore drastically different from the common convection furnace designed for the SMT circuit industry. They must be compact and must be environmentally friendly, i.e. use less electricity, and less nitrogen or forming gas. For the processing of plastic BGAs, for example, a cycle rate of 10 seconds or less must be achieved and this should be accomplished in single file. The furnace must be less than 5 feet long. This paper discusses how to achieve these aims.
回流技术近年来发生了一些重大变化。这在很大程度上是由于行业要求提高过程控制。三个主要因素有助于实现这一目标:温度、时间和大气。不仅要控制每个片段,而且必须同时完成,因为每个片段都与其他片段相互作用。一种成分符合规格而另一种不符合规格,这是不能容忍的。因此,电流炉与为SMT电路工业设计的普通对流炉截然不同。它们必须紧凑,必须是环保的,即使用更少的电力,更少的氮或形成气体。例如,对于塑料bga的加工,必须达到10秒或更短的周期速率,并且应该在单个文件中完成。炉子必须小于5英尺长。本文就如何实现这些目标进行了探讨。
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引用次数: 0
Reliability study of the laminate-based flip-chip chip scale package 基于层压的倒装芯片芯片级封装可靠性研究
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704506
Y. Matsuda, T. Takai, Y. Okada, P. Lall, C. Koehler, T. Tessier, D. Olsen
The just about chip size package (JACS-Pak) design was developed for portable product applications. The package elements are solder bumped die, an epoxy underfill resin with inorganic filler, a low cost double-sided, semi-rigid epoxy glass or flex substrate, and solder ball terminals. This paper focuses on the board level reliability of the JACS-Pak package and benchmarks it with respect to standard ball grid array (BGA) packages, such as the glob top-BGA (GT-BGA) and the over molded pad array carrier (OMPAC). The samples (packages solder reflow attached to PCBs) are subjected to the liquid-to-liquid thermal shock testing from -55 to 125/spl deg/C at a rate of 5.8 cycles per hour. The results are compared to the thermal fatigue performance of standard 196 I/O GT-BGA and the 1.5 mm pitch OMPAC package. In addition, temperature cycling, temperature-humidity bias (THB), high temperature storage life (HTSL), and autoclave reliability tests were performed on the JACS-Pak package with excellent results.
几乎芯片大小的封装(JACS-Pak)设计是为便携式产品应用而开发的。封装元件是焊接凸模、含无机填料的环氧底料树脂、低成本双面半刚性环氧玻璃或柔性基板以及焊接球端子。本文重点研究了jacks - pak封装的板级可靠性,并将其与标准球栅阵列(BGA)封装进行了基准测试,例如球形顶部BGA (GT-BGA)和过模垫阵列载波(OMPAC)。样品(附在pcb上的封装焊料回流液)以每小时5.8次的速率在-55至125/spl度/C范围内进行液对液热冲击测试。结果与标准196 I/O GT-BGA和1.5 mm间距OMPAC封装的热疲劳性能进行了比较。此外,对JACS-Pak封装进行了温度循环、温湿度偏置(THB)、高温储存寿命(HTSL)和高压灭菌器可靠性测试,取得了优异的结果。
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引用次数: 1
Simple assembly scheme of a corner-illuminated PD on a hybridly integrated planar lightwave circuit (PLC) platform 角照式PD在混合集成平面光波电路(PLC)平台上的简单装配方案
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704536
G. Nakagawa, T. Yamamoto, S. Sasaki, N. Yamamoto, K. Tanaka, M. Norimatsu, M. Kobayashi, K. Miura, M. Yano
We report a planar integration scheme for a corner-illuminated photodiode (PD) on a planar lightwave circuit (PLC) platform for highly uniform optical coupling for receiver-PDs and monitor-PDs. We adjusted the marker on the PD to the waveguide on the PLC and the marker on the platform, and deviations from the center position are small, to within /spl plusmn/10 /spl mu/m. The corner-illuminated PD has large lateral tolerance of 65 /spl mu/m for the receiver-PD and 160 /spl mu/m for the monitor-PD. These result in high monitor current uniformity. High average coupling efficiency was obtained for the receiver-PD, with a loss of 0.7/spl plusmn/0.3 dB. As for the monitor-PD, uniform currents of 312/spl plusmn/45 /spl mu/A (/spl plusmn/0.7 dB in optical power) at -2 dBm optical power was obtained. The deviation of optical coupling between the LD and monitor-PD is estimated to be almost 0 dB, judging from deviation of the optical coupling between the LD and the PLC waveguide which is evaluated to be /spl plusmn/0.7 dB. We have confirmed that the corner-illuminated PD and its alignment method are promising for highly uniform characteristics with a surface mounting configuration.
我们报道了一种在平面光波电路(PLC)平台上的角照明光电二极管(PD)的平面集成方案,用于接收器-PD和监视器-PD的高度均匀光耦合。我们将PD上的标记调整到PLC上的波导和平台上的标记,与中心位置的偏差很小,在/spl plusmn/10 /spl mu/m以内。边角照明PD具有较大的横向公差,接收PD为65 /spl mu/m,监控PD为160 /spl mu/m。这导致高监测电流均匀性。接收器- pd获得了较高的平均耦合效率,损耗为0.7/spl + usmn/0.3 dB。对于监视器- pd,在-2 dBm光功率下获得了312/ plusmn/45 /spl mu/A (/spl plusmn/0.7 dB光功率)的均匀电流。从LD与PLC波导之间的光耦合偏差(估计为/spl plusmn/0.7 dB)判断,LD与监视器- pd之间的光耦合偏差估计约为0 dB。我们已经证实,角照明PD及其对准方法有望实现表面安装配置的高度均匀特性。
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引用次数: 0
Development of fine pitch ball grid array 细间距球栅阵列的研制
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704514
J. Shibata, M. Horita, N. Izumi, T. Shikano, M. Okada, Y. Noguchi, K. Imamura, H. Fukunaga, M. Yasunaga, T. Hirai, T. Hashimoto, Y. Takemoto
A fine pitch ball grid array (FBGA) has been developed which is suitable mainly for logic devices such as micro control units (MCU) and application specific integrated circuits (ASIC) for consumer portable electronic instruments. The FBGA has a construction in which a die is attached to a glass-epoxy interposer with a single layer conductor. Wire bonding and transfer molding are applied in the same manner as lead frame type packages. The FBGA has a smaller body and higher performance than conventional packages. The package structure, assembly process, performance and reliability test results are introduced.
开发了一种主要适用于消费类便携式电子仪器的微控制单元(MCU)和专用集成电路(ASIC)等逻辑器件的细间距球栅阵列(FBGA)。FBGA具有一种结构,其中模具连接到具有单层导体的玻璃环氧树脂中间层。电线粘合和传递成型应用于引线框架型封装相同的方式。与传统封装相比,FBGA具有更小的机身和更高的性能。介绍了封装结构、装配工艺、性能及可靠性试验结果。
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引用次数: 0
3-dimensional memory module assembly technology 三维内存模块组装技术
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704634
Y. Kyouogku, Y. Yamaguti, K. Ohkubo
In order to meet the demand for higher density and greater capacity, a three dimensional memory module has been developed. NEC has developed a new type of 3D memory module which uses single memory module stacking technology. It satisfies the demands for higher packaging density using a simple structure. The reliability of the single memory modules and 3D memory module was tested using 16 Mb DRAM chips. The results suggest that our 3D memory modules have good reliability. With our dual in-line memory modules (DIMM), no breaks in the solder bonds between single memory modules and motherboard were observed over 3000 cycles of thermal cycling testing.
为了满足更高密度和更大容量的需求,开发了三维存储模块。NEC开发了一种新型3D存储模块,该模块采用了单个存储模块堆叠技术。它以简单的结构满足了更高的包装密度的要求。采用16mb的DRAM芯片,测试了单内存模块和3D内存模块的可靠性。结果表明,我们的三维存储模块具有良好的可靠性。使用我们的双列式内存模块(DIMM),在超过3000次的热循环测试中,没有观察到单个内存模块和主板之间的焊接键断裂。
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引用次数: 4
期刊
2nd 1998 IEMT/IMC Symposium (IEEE Cat. No.98EX225)
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