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2nd 1998 IEMT/IMC Symposium (IEEE Cat. No.98EX225)最新文献

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A new composite substrate with high thermal conductivity for power modules 一种用于功率模块的新型高导热复合基板
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704668
K. Hirano, S. Nakatani, H. Handa, H. Takehara
Recently, it has become more important to take the thermal dispersion of circuit boards into account. We have developed a new composite substrate with high thermal conductivity (HTC-CS) which is suitable for power modules. The main points of development of the substrate are: (1) newly developed composite materials with high thermal conductivity; (2) use of the lead frame (L/F) as a conductive layer; (3) use of thermally conductive sheets (TCSs) and realization of a simple procedure. Alumina and epoxy resin were mixed to make a slurry and were made into sheets by the doctor blade method. The sheet (TCS) was flexible while the resin was not hardened. The TCS was laid on the L/F and heated under pressure. The TCS moved into the gaps in the L/F patterns and the surface became flat; simultaneously, the resin in the TCS hardened to produce a rigid substrate. The substrate thermal conductivity was above 5 W/mK. The substrate was applied to intelligent power modules (IPM). These IPMs showed good reliability. In addition, it is simple to insert a shield layer in the substrate using the TCS procedure, and the substrate has high noise stability.
近年来,考虑电路板的热分散变得越来越重要。我们开发了一种适用于功率模块的新型高导热复合基板(HTC-CS)。基板的发展要点有:(1)新开发的高导热复合材料;(2)采用引线框架(L/F)作为导电层;(3)利用导热片材(TCSs)并实现一个简单的程序。将氧化铝和环氧树脂混合成浆料,用博士刀法制成片材。板材(TCS)是柔性的,而树脂没有硬化。TCS放在L/F上,在压力下加热。TCS进入L/F模式的间隙,表面变得平坦;同时,TCS中的树脂硬化产生刚性基材。衬底导热系数大于5 W/mK。该基板应用于智能功率模块(IPM)。这些IPMs具有良好的可靠性。此外,使用TCS程序在基板中插入屏蔽层很简单,并且基板具有高噪声稳定性。
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引用次数: 0
Advanced MCM-Ls for consumer electronics 用于消费电子产品的先进mcm - l
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704631
K. Amami, S. Yuhaku, T. Shiraishi, Y. Bessho, K. Eda, T. Ishida
We have developed an advanced MCM (multichip module) using the SBB/sup TM/ (stud-bump bonding) flip-chip technique on an ALIVH/sup TM/ (any layer inner via hole) structure substrate. The SBB technique is an advanced flip-chip bonding technique for high density MCM, which can mount bare LSI chips directly on substrates. The bonding portion structure is composed of Au bumps with two-stepped construction and conductive adhesives. The conductive adhesive is very flexible in bond, thus relaxing thermal and mechanical stresses. The ALIVH substrate is a high density and high performance multilayered printed wiring board with any layer inner via hole structure, CO/sub 2/ laser via hole processing technology and interconnection technology which employs conductive paste. We had good results for several reliability tests in the advanced MCM-L test vehicles. In particular, in the thermal shock test, the increase in connection resistance in the advanced MCM-Ls was smaller than that of MCM-Ls which used ordinary organic substrates instead of the ALIVH substrate. We manufactured a CCD camera module using these MCM-Ls. LSI chips were mounted on the six-layered ALIVH substrate. The MCM-Ls obtained was downsized (60% down) and lighter in weight (30% reduction) when compared with the conventional module, and the electrical characteristics of the newly manufactured CCD camera module were equal to those of the conventional module.
我们开发了一种先进的MCM(多芯片模块),在ALIVH/sup TM/(任何层内通孔)结构基板上使用SBB/sup TM/(螺杆碰撞键合)倒装芯片技术。SBB技术是一种用于高密度MCM的先进倒装芯片键合技术,它可以直接将裸LSI芯片安装在基板上。粘接部分结构由两级结构的金凸起和导电胶粘剂组成。导电胶粘剂在粘合时非常灵活,因此可以放松热应力和机械应力。ALIVH基板是一种高密度、高性能的多层印刷线路板,具有任意层内通孔结构,采用CO/sub /激光通孔加工技术和导电浆料互连技术。我们在先进的MCM-L试验车上进行了几次可靠性试验,取得了良好的结果。特别是在热冲击试验中,先进的MCM-Ls连接电阻的增加比使用普通有机衬底代替ALIVH衬底的MCM-Ls要小。我们利用这些mcm - l制造了一个CCD相机模块。将LSI芯片安装在六层ALIVH衬底上。与传统模组相比,所获得的mcm - l尺寸缩小(缩小60%),重量减轻(减轻30%),并且新制造的CCD相机模组的电气特性与传统模组相同。
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引用次数: 1
New flip chip attach technology for fine pitch interconnections using electroplated copper bumps formed on a substrate 新的倒装芯片连接技术,采用在衬底上形成的电镀铜凸点进行细间距互连
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704701
F. Ueno, T. Motomura, H. Hirai, O. Shimada, Y. Sonoda, Y. Fukuoka
We have developed a new FCA (flip chip attach) technology based on a new concept. Bump formation is very important in FCA technology. In conventional FCA technology, bumps are formed on bare chips, and an additional process to LSI manufacturing processes is required for bump formation on the wafer to complete the semiconductor device functional circuits. However, bumps in the new technology are formed on the PWB. Consequently, it is possible to use bare chips supplied by any semiconductor device maker. We have developed two kinds of bump formation technologies based on a newly developed concept. The first is a method using silver paste bumps produced by thick film printing technology (presented at 1996 IMC), and the second is a method using electroplated copper bumps for fine pitch interconnections. In this process, copper bumps are formed on PWB electrode pads by electroplating. Then, underfill resin is dispensed to the bare chip assembly area of the PWB. After bare chip I/O pads are positioned on the bumps, the bare chip is pressed and heated. The underfill resin is then rapidly hardened to retain the bump interconnections between the PWB pads and the bare chip I/O pads. This FCA technology can supply a very simple process and structure. We examined the reliability of this FCA technology by temperature cycling and temperature humidity tests. This FCA technology is very useful for realization of a high density module with fine pitch I/O devices with I/O pitch under 200 /spl mu/m.
我们基于一个新概念开发了一种新的FCA(倒装芯片连接)技术。碰撞形成在FCA技术中非常重要。在传统的FCA技术中,凸起是在裸片上形成的,为了完成半导体器件的功能电路,在晶圆上形成凸起需要LSI制造工艺的附加工艺。然而,新技术在PWB上形成了颠簸。因此,可以使用任何半导体设备制造商提供的裸芯片。基于一个新发展的概念,我们开发了两种凹凸形成技术。第一种是使用厚膜印刷技术产生的银膏凸起(1996年IMC上提出)的方法,第二种是使用电镀铜凸起进行细间距互连的方法。在该工艺中,通过电镀在PWB电极垫上形成铜凸起。然后,在pcb的裸芯片组装区涂覆下填料树脂。将裸芯片I/O垫放置在凸起上后,对裸芯片进行按压和加热。然后,衬底树脂迅速硬化,以保持PWB衬垫和裸芯片I/O衬垫之间的凹凸互连。这种FCA技术可以提供非常简单的工艺和结构。我们通过温度循环和温度湿度测试来检验这种FCA技术的可靠性。这种FCA技术对于实现I/O螺距低于200 /spl mu/m的小螺距I/O器件的高密度模块非常有用。
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引用次数: 5
High density printed circuit board using B/sup 2/it/sup TM/ technology 高密度印刷电路板采用B/sup 2/it/sup TM/技术
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704667
K. Goto, T. Oguma, Y. Fukuoka
The authors have developed the B/sup 2/it printed circuit board. The technology was reported initially in a paper at the IMC meeting in April 1996. Since that time, this technology has been applied to a variety of boards. Among these boards, we report in this paper the B/sup 2/it application to semiconductor packaging. The product has /spl phi/0.2/spl sim/0.1 mm bumps (fine bumps). In order to produce a multilayer high density printed circuit board, we need to add up each layer with conductive bumps over the base layer, which we call the en bloc laminate process. By repeating the en bloc laminate process multiple times, multilayers and stacked arrays are possible. Signals can go down to internal layers directly from surface pad via bumps. This is effective for substrates such as BGA type packages. With the use of the B/sup 2/it/sup TM/ method, it is possible to omit the outer layer plating process. This is an advantage for fine line patterning, because etching the copper foil alone enables circuit patterning. In addition, we introduced two types of liquid photoresist process: the ED method, and the spin coater liquid photoresist process.
作者开发了B/sup 2/it印刷电路板。这项技术最初在1996年4月IMC会议上的一篇论文中报告。从那时起,这项技术已经应用于各种各样的板。在这些电路板中,我们报告了B/sup /it在半导体封装中的应用。产品有/spl φ /0.2/spl sim/0.1 mm凸起(细凸起)。为了生产多层高密度印刷电路板,我们需要在每一层的基础层上加上导电凸起,我们称之为整体层压工艺。通过多次重复整体层压工艺,多层和堆叠阵列成为可能。信号可以通过凸起直接从表面垫层传递到内层。这是有效的基板,如BGA型封装。使用B/sup 2/it/sup TM/方法,可以省略外层电镀工艺。这是一个优点,为细线图案,因为蚀刻铜箔单独使电路图案。此外,我们还介绍了两种类型的液体光刻胶工艺:ED法和自旋涂布液体光刻胶工艺。
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引用次数: 3
Advanced substrate and packaging technology 先进的基板和封装技术
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704501
T. Ishida
Key future semiconductor packaging technology lies in bare-chip packaging technology and high-density circuit board technology. In bare-chip packaging technology, flip-chip packaging has been developed, while in high-density PCB technology, newly-designed substrate structures such as the build-up substrate have been developed. Matsushita have been developing stud-bump bonding (SBB) technology as a bare-chip packaging technology, and the any layer inner via hole (ALIVH) substrate as a high-density PCB. The overall development of packaging technology resulted in the development of the P201KYPER mobile phone with a weight less than 100 g for the first time in 1996 using the ALIVH substrate, and in 1997, we developed the P205HYPER mobile phone with a weight less than 80 g for the first time. The application of SBB and ALIVH technology offered early realization of these products, showing how great a role packaging technology plays in the development of electronic equipment. Considering business objectives to increase the market share by a strong product with higher performance or distinctive characteristics, the importance of semiconductor packaging technology is set to increase dramatically in future. This paper describes the concept, content and roadmap of the technology development, mostly in connection with the packaging technology developed by Matsushita.
未来半导体封装技术的关键在于裸片封装技术和高密度电路板技术。在裸片封装技术中,已经发展了倒装封装,而在高密度PCB技术中,已经发展了新的衬底结构,如积层衬底。松下一直在开发凸钉键合(SBB)技术作为裸片封装技术,并将任意层内通孔(ALIVH)基板作为高密度PCB。封装技术的整体发展导致1996年使用ALIVH基板首次开发出重量小于100 g的P201KYPER手机,并于1997年首次开发出重量小于80 g的P205HYPER手机。SBB和ALIVH技术的应用提供了这些产品的早期实现,显示了封装技术在电子设备发展中的巨大作用。考虑到通过具有更高性能或独特特性的强大产品来增加市场份额的业务目标,半导体封装技术的重要性将在未来急剧增加。本文介绍了该技术开发的概念、内容和路线图,主要与松下公司开发的封装技术有关。
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引用次数: 9
Fabrication of a parallel inter-board optical interconnection module using transferred multichip bonding 采用转移多芯片键合的平行板间光互连模块的制造
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704537
A. Ohki, M. Usui, N. Sato, N. Matsuura, K. Katsura, Y. Ando
ParaBIT (parallel inter-board optical interconnection technology) is a promising candidate for large-capacity board-to-board interconnection. In ParaBIT module assembly, a new multichip diebonding technique is needed, because precise optical device chip mounting is required for efficient optical coupling at the E/O (electric/optic conversion) and O/E (optic/electric conversion) interfaces. In this paper, we have proposed a new technique, called TMB (transferred multichip bonding), for the precise mounting of multiple optical device chips. We have also described the detailed procedures of TMB and demonstrated its use in ParaBIT module assembly.
平行板间光互连技术(ParaBIT)是大容量板对板互连的一个很有前途的候选技术。在ParaBIT模块组装中,由于精确的光学器件芯片安装需要在E/O(电/光转换)和O/E(光/电转换)接口上实现有效的光耦合,因此需要一种新的多芯片diebonding技术。在本文中,我们提出了一种新的技术,称为TMB(转移多芯片键合),用于精确安装多个光学器件芯片。本文还详细介绍了TMB的实现过程,并演示了TMB在ParaBIT模块组装中的应用。
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引用次数: 5
A compact modeling approach using a genetic algorithm for accurate thermal simulation 采用遗传算法的紧凑建模方法进行精确的热模拟
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704552
T. Nishio, Y. Yamada, K. Koyamada
The rapid improvement in computer performance is intensifying the component thermal problem. It is becoming increasingly important for an optimal thermal design that thermal simulation is part of the design. Simplification of the thermal simulation model is inevitable as an enormous number of finite elements are required when the original CAD data set is adopted for modeling. However, the reduction of calculation time by model simplification and the maintenance of calculation accuracy are contradictory. Conventionally, model simplification is by empirical judgment, but a rational simplification technique using boundary conditions and material properties results in a more accurate and reliable calculation. Although simplification of the LSI component modeling method has been proposed by the Delphi project, it is difficult to apply other than to components, such as a keyboard. This paper proposes a new technique to generate the compact model of a keyboard with the required accuracy. First, some candidates for the simplified configurations are prepared. A genetic algorithm is proposed to identify the variables such as the boundary conditions and thermal conductivities that are most important in a high accuracy calculation. Finally, the optimum compact model which has the required accuracy is selected from the simplified models.
计算机性能的快速提高加剧了部件的热问题。热模拟作为设计的一部分,对于优化热设计变得越来越重要。采用原始CAD数据集进行建模时,由于需要大量的有限元,热仿真模型的简化是不可避免的。然而,通过模型简化来减少计算时间与保持计算精度是矛盾的。传统上,模型简化是通过经验判断,但利用边界条件和材料特性的合理简化技术可以使计算更加准确和可靠。虽然简化的LSI元件建模方法已经由Delphi项目提出,但它很难应用于其他组件,如键盘。本文提出了一种生成精度要求较高的键盘紧凑模型的新方法。首先,准备了一些简化构型的候选体。提出了一种遗传算法来识别边界条件和热导率等对高精度计算至关重要的变量。最后,从简化模型中选择出精度要求较高的最优紧凑模型。
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引用次数: 1
Chip scale package (CSP) solder joint reliability and modeling 芯片规模封装(CSP)焊点可靠性和建模
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704625
M. Amagai
A viscoplastic constitutive model was used to analyze the thermally induced plastic and creep deformation and low cycle fatigue behavior of the solder joints in chip scale packages (CSP) mounted on PCBs. The time-dependent and time-independent viscoplastic strain rate and plastic hardening work factors of solder material were used in 2D plane strain finite element models. The viscoplastic strain rate data was fitted to the viscoplastic flow equation. The plastic hardening factors were considered in the evolution equation. Finite element models, incorporating the viscoplastic flow and evolution equations, were verified by temperature cycling tests on assembled CSPs. The effect of the cyclic frequency, dwell time, and temperature ramp rate on the viscoplastic deformation was studied for a tapeless lead-on-chip (LOC) CSP and a flexible substrate CSP. The ramp rate significantly affects the equivalent stress range in solder joints, while a dwell time in excess of 10 minutes per half cycle does not result in an increased strain range. The failure data from the experiments was fitted to the Weibull failure distribution and the Weibull parameters were extracted. After satisfactory correlation between experiment and model was observed, the effect of material properties and package design variables on the fatigue life of solder joints in CSPs was investigated and the primary factors affecting solder fatigue life were subsequently presented. Furthermore, a simplified model was proposed to predict solder fatigue life in CSPs.
采用粘塑性本构模型分析了印制电路板上芯片级封装(CSP)焊点的热致塑性、蠕变变形和低周疲劳行为。在二维平面应变有限元模型中采用了随时间变化和随时间变化的焊料粘塑性应变率和塑性硬化功系数。粘塑性应变率数据拟合到粘塑性流动方程中。在演化方程中考虑了塑性硬化因素。结合粘塑性流动方程和演化方程的有限元模型,通过装配csp的温度循环试验进行了验证。研究了循环频率、停留时间和温度斜坡率对无带片上铅(LOC) CSP和柔性基板CSP粘塑性变形的影响。斜坡速率显著影响焊点的等效应力范围,而每半个周期停留时间超过10分钟不会导致应变范围的增加。将试验数据拟合到威布尔失效分布中,提取威布尔参数。在实验与模型得到满意的相关性后,研究了材料性能和封装设计变量对csp焊点疲劳寿命的影响,并给出了影响焊点疲劳寿命的主要因素。此外,提出了一种简化的csp焊料疲劳寿命预测模型。
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引用次数: 54
Inner bump bonding technology for CSP CSP内凸焊技术
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704529
R. Sato, S. Matsuda, K. Kata
D/sup 2/BGA (die dimension BGA) is an NEC CSP, consisting of die, flexible printed circuit tape, resin, solder bumps and reinforcement resin. Assembly consists of bonding, lamination, encapsulation, solder ball placement and singulation. The bonding technique uses IBB (inner bump bonding) technology. IBB is similar to ILB (inner lead bonding), using an ultrasonic thermocompression single point bonder for TAB. Instead of the TAB inner lead, inner bumps are bonded to an Al pad. The polyimide film is drilled on the Cu trace by laser ablation. The inner bumps are made of an electrodeposited Cu core and Au plating. Various factors affected the Al-Au intermetallic bond: (1) inner bump shape; (2) inner bump deformation; (3) polyimide base film thickness; and (4) the adhesive properties. The Au layer deformation ratio was one of the most important factors; in the three bonded parts, the Au layer, Cu core and Cu trace, Au layer deformation affected bonding quality most significantly. A lower Au layer deformation ratio resulted in poorer bonding. A low Cu core deformation ratio resulted in a high Au layer deformation ratio and gave a good intermetallic bond between the Au plated Cu bump and the Al pad. Flexible PC tape had a thermoplastic polyimide adhesive layer on the die side, and the bonding area was reinforced by the adhesive layer during the bonding operation. The adhesive properties were also found to affect the intermetallic bond. Lower adhesive strength caused damage to the Al pad or Si chip during bonding. Strong flexible PC tape-die surface adhesion resulted in highly reliable bonding.
D/sup 2/BGA (die dimension BGA)是一种NEC CSP,由模具、柔性印刷电路带、树脂、焊料凸点和增强树脂组成。组装包括粘接、层压、封装、焊球放置和封装。粘接技术采用IBB(内碰撞粘接)技术。IBB类似于ILB(内引线键合),使用TAB的超声波热压单点键合机。代替TAB内部引线,内部凸起连接到一个Al垫。采用激光烧蚀法在铜表面钻孔制备聚酰亚胺薄膜。内部凸起由电沉积的铜芯和镀金制成。影响Al-Au金属间键的因素有:(1)内凸形状;(2)内凹凸变形;(3)聚酰亚胺基膜厚度;(4)粘接性能。金层变形率是影响变形的重要因素之一;在金层、铜芯和铜迹三个焊件中,金层变形对焊件质量的影响最为显著。较低的金层变形率导致较差的结合。较低的铜芯变形率导致较高的金层变形率,并使镀金铜凸块与铝衬垫之间形成良好的金属间键合。柔性PC胶带在模侧有一层热塑性聚酰亚胺粘接层,粘接时粘接区域被粘接层加固。粘接性能对金属间键也有影响。粘接强度较低,导致铝板或硅片在粘接过程中受损。柔性PC带模表面附着力强,粘接可靠性高。
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引用次数: 3
High reliability and compression flow underfill encapsulant for flip-chip applications 用于倒装芯片应用的高可靠性和压缩流下填充密封剂
Pub Date : 1998-04-15 DOI: 10.1109/IEMTIM.1998.704524
O. Suzuki, H. Yoshii, K. Suzuki
We have developed a next generation underfill encapsulant material for a compression bonding chip assembly process that is based on epoxy resin. As it has a high moisture resistance, we selected phenol resin as the curing agent for epoxy resin. The underfill material can be very significant for improvement of the flip chip assembly process for chip scale packages (CSP), multichip modules (MCM), and typical small packages. This compression bonding chip assembly process is very significant for low cost realization with high level production. However, the conventional underfill material could not adapt to the new assembly process which has a fast-cure process with the polymerization of the underfill. In this paper, we present specific experimental results for our underfill in this new flip-chip assembly process.
我们已经开发了一种基于环氧树脂的下一代压缩粘合芯片组装工艺的下填充封装材料。由于它具有较高的耐湿性,我们选择苯酚树脂作为环氧树脂的固化剂。下填充材料对于改善芯片规模封装(CSP)、多芯片模块(MCM)和典型小封装的倒装芯片组装工艺具有重要意义。这种压缩键合芯片组装工艺对于实现低成本、高水平生产具有重要意义。然而,传统的下填料材料不能适应新型的下填料聚合快速固化的装配工艺。在本文中,我们给出了在这种新的倒装芯片组装工艺中我们的底填料的具体实验结果。
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引用次数: 0
期刊
2nd 1998 IEMT/IMC Symposium (IEEE Cat. No.98EX225)
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