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Mitigating the Process Variations in Negative Capacitance Junctionless Device and Circuit 减小负电容无结器件和电路的工艺变化
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-02-26 DOI: 10.1109/TDMR.2026.3668390
Ruma S. R.;Manish Gupta
Through well-calibrated simulations, this work presents a comprehensive analysis of process-induced variations in on-current ( $I_{mathrm {ON}}$ ), off-current ( $I_{mathrm {OFF}}$ ), and threshold voltage ( $V_{mathrm {th}}$ ) for negative capacitance (NC) junctionless (JL) transistors designed on bulk substrate. The performance and variability metrics are benchmarked against SOI-based NCJL transistors. The results reveal a significant reduction in $sigma (I_{mathrm {ON}})$ , $sigma (I_{mathrm {OFF}})$ , and $sigma (V_{mathrm {th}})$ due to the variation in geometrical device parameters in bulk NCJL devices. The outperformance is primarily due to the shift in the conduction channel towards the front surface, which enhances the effectiveness of the negative capacitance effect in bulk NCJL device. In addition, the lower variability observed in bulk NCJL devices translates into improved noise margin (NM) and reduced process-induced NM fluctuations in inverter circuits. Results reported for the first time demonstrate the enhanced device- and circuit-level performance of bulk NCJL transistors in comparison to their SOI counterparts.
通过精心校准的模拟,本工作全面分析了在块基板上设计的负电容(NC)无结(JL)晶体管的导通电流($I_{mathrm {ON}}$)、关断电流($I_{mathrm {OFF}}$)和阈值电压($V_{mathrm {th}}$)过程引起的变化。性能和可变性指标是针对基于soi的NCJL晶体管的基准测试。结果表明,由于批量NCJL器件几何参数的变化,$sigma (I_{mathrm {ON}})$、$sigma (I_{mathrm {OFF}})$和$sigma (V_{mathrm {th}})$显著减少。这种优异的性能主要是由于传导通道向前表面移动,从而增强了块体NCJL器件中负电容效应的有效性。此外,在批量NCJL器件中观察到的较低可变性转化为逆变电路中改进的噪声裕度(NM)和减少工艺诱导的NM波动。报告的结果首次证明了与SOI晶体管相比,块状NCJL晶体管的器件和电路级性能得到了增强。
{"title":"Mitigating the Process Variations in Negative Capacitance Junctionless Device and Circuit","authors":"Ruma S. R.;Manish Gupta","doi":"10.1109/TDMR.2026.3668390","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3668390","url":null,"abstract":"Through well-calibrated simulations, this work presents a comprehensive analysis of process-induced variations in on-current (<inline-formula> <tex-math>$I_{mathrm {ON}}$ </tex-math></inline-formula>), off-current (<inline-formula> <tex-math>$I_{mathrm {OFF}}$ </tex-math></inline-formula>), and threshold voltage (<inline-formula> <tex-math>$V_{mathrm {th}}$ </tex-math></inline-formula>) for negative capacitance (NC) junctionless (JL) transistors designed on bulk substrate. The performance and variability metrics are benchmarked against SOI-based NCJL transistors. The results reveal a significant reduction in <inline-formula> <tex-math>$sigma (I_{mathrm {ON}})$ </tex-math></inline-formula>, <inline-formula> <tex-math>$sigma (I_{mathrm {OFF}})$ </tex-math></inline-formula>, and <inline-formula> <tex-math>$sigma (V_{mathrm {th}})$ </tex-math></inline-formula> due to the variation in geometrical device parameters in bulk NCJL devices. The outperformance is primarily due to the shift in the conduction channel towards the front surface, which enhances the effectiveness of the negative capacitance effect in bulk NCJL device. In addition, the lower variability observed in bulk NCJL devices translates into improved noise margin (<italic>NM</i>) and reduced process-induced <italic>NM</i> fluctuations in inverter circuits. Results reported for the first time demonstrate the enhanced device- and circuit-level performance of bulk NCJL transistors in comparison to their SOI counterparts.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"503-509"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148510328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental Investigation Into Ageing Mechanisms and Behavior Prediction Model of Flexible Electronic Substrates Under Temperature–Humidity–Bending Conditions 温湿弯曲条件下柔性电子衬底老化机理及行为预测模型的实验研究
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-16 DOI: 10.1109/TDMR.2026.3674172
Zhifeng He;Kaixuan Wang;Mingmin Zhu;Haibin Zhu;Hao-Miao Zhou
Flexible electronic substrates, as the critical constituent of flexible electronic devices and systems, are essential for component interconnection and overall structural flexibility. During service, they are routinely subjected to diverse temperature–humidity environments and static bending conditions. These external factors progressively induce material ageing and deterioration of electrical interconnect performance. The actual occurrence of ageing in flexible electronic substrates was experimentally confirmed by subjecting them to accelerated ageing tests. Electrical resistance was employed as the ageing indicator. The influence mechanisms of temperature–humidity conditions, bending radius, and specimen specifications on the ageing process were systematically quantified. A physics-based characterization model for the ageing effect was subsequently derived. A hybrid physics-informed neural network (PINN) was then constructed and trained to predict resistance evolution. The model achieved a mean relative error of 0.02% against measured data, demonstrating its validity and high accuracy. This work provides a direct quantitative basis for reliability assessment and performance-degradation prediction of flexible-substrate-based electronic devices. It thus potentially offers valuable support for ensuring and enhancing product quality and operational lifetime.
柔性电子衬底作为柔性电子器件和系统的关键组成部分,对元件互连和整体结构的灵活性至关重要。在使用过程中,它们经常受到各种温度、湿度环境和静态弯曲条件的影响。这些外部因素逐渐导致材料老化和电气互连性能的恶化。通过对柔性电子衬底进行加速老化试验,证实了柔性电子衬底的实际老化现象。采用电阻作为老化指标。系统地量化了温湿度条件、弯曲半径和试样规格对老化过程的影响机制。随后导出了老化效应的物理表征模型。然后构建并训练混合物理信息神经网络(PINN)来预测抗性进化。该模型相对于实测数据的平均相对误差为0.02%,证明了该模型的有效性和较高的精度。这项工作为柔性基板电子器件的可靠性评估和性能退化预测提供了直接的定量依据。因此,它可能为确保和提高产品质量和使用寿命提供有价值的支持。
{"title":"Experimental Investigation Into Ageing Mechanisms and Behavior Prediction Model of Flexible Electronic Substrates Under Temperature–Humidity–Bending Conditions","authors":"Zhifeng He;Kaixuan Wang;Mingmin Zhu;Haibin Zhu;Hao-Miao Zhou","doi":"10.1109/TDMR.2026.3674172","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3674172","url":null,"abstract":"Flexible electronic substrates, as the critical constituent of flexible electronic devices and systems, are essential for component interconnection and overall structural flexibility. During service, they are routinely subjected to diverse temperature–humidity environments and static bending conditions. These external factors progressively induce material ageing and deterioration of electrical interconnect performance. The actual occurrence of ageing in flexible electronic substrates was experimentally confirmed by subjecting them to accelerated ageing tests. Electrical resistance was employed as the ageing indicator. The influence mechanisms of temperature–humidity conditions, bending radius, and specimen specifications on the ageing process were systematically quantified. A physics-based characterization model for the ageing effect was subsequently derived. A hybrid physics-informed neural network (PINN) was then constructed and trained to predict resistance evolution. The model achieved a mean relative error of 0.02% against measured data, demonstrating its validity and high accuracy. This work provides a direct quantitative basis for reliability assessment and performance-degradation prediction of flexible-substrate-based electronic devices. It thus potentially offers valuable support for ensuring and enhancing product quality and operational lifetime.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"475-484"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148514354","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Comparative Review of Junction Temperature Monitoring for SiC-Based Power Semiconductor Devices 基于sic的功率半导体器件结温监测比较综述
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-04 DOI: 10.1109/TDMR.2026.3689949
Guangjie Zhu;Xiangshun Li;Song Xiong;Cheng Wang
Silicon carbide power devices, representing third-generation semiconductors, are widely used in the areas of industrial control, rail transportation, electric vehicles, and renewable energy. As crucial components of power electronic systems, their reliability is vital to the safe operation of entire systems. Temperature is a critical factor affecting device reliability, and junction temperature serves as a key indicator reflecting the thermal state of the device. Accurate monitoring of junction temperature is therefore essential for tracking device conditions and assessing reliability. This paper provides a comparative review of advances in junction temperature monitoring for silicon carbide-based power devices, systematically analyzing four primary methods: thermal network model, temperature-sensitive electrical parameter, physical contact sensing, and non-contact optical methods. The principles, advantages and limitations as well as applicable situations of each method are analyzed in detail. Furthermore, the evolutionary trajectory of the estimation methods and associated validation techniques are summarized. Finally, challenges and future prospects for junction temperature monitoring for silicon carbide-based power devices are presented. This review concludes that temperature-sensitive electrical parameters method represent the most promising technique for future junction temperature monitoring. Nevertheless, significant challenges persist, particularly in relation to aging-induced coupling and the complexities of accurate parameter extraction. The purpose of this review is to provide helpful theoretical support and methodological guidance to researchers in related fields.
碳化硅功率器件是第三代半导体的代表,广泛应用于工业控制、轨道交通、电动汽车、可再生能源等领域。作为电力电子系统的关键部件,其可靠性对整个系统的安全运行至关重要。温度是影响器件可靠性的关键因素,结温是反映器件热状态的关键指标。因此,准确监测结温对于跟踪设备状况和评估可靠性至关重要。本文综述了基于碳化硅的功率器件结温监测的研究进展,系统地分析了四种主要方法:热网络模型法、温度敏感电参数法、物理接触传感法和非接触光学法。详细分析了各种方法的原理、优点和局限性以及适用情况。此外,总结了评估方法和相关验证技术的发展轨迹。最后,提出了碳化硅基功率器件结温监测的挑战和未来展望。本文认为,温度敏感电参数法是未来结温监测中最有前途的技术。然而,重大的挑战仍然存在,特别是与老化引起的耦合和精确参数提取的复杂性有关。本文旨在为相关领域的研究人员提供有益的理论支持和方法指导。
{"title":"A Comparative Review of Junction Temperature Monitoring for SiC-Based Power Semiconductor Devices","authors":"Guangjie Zhu;Xiangshun Li;Song Xiong;Cheng Wang","doi":"10.1109/TDMR.2026.3689949","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3689949","url":null,"abstract":"Silicon carbide power devices, representing third-generation semiconductors, are widely used in the areas of industrial control, rail transportation, electric vehicles, and renewable energy. As crucial components of power electronic systems, their reliability is vital to the safe operation of entire systems. Temperature is a critical factor affecting device reliability, and junction temperature serves as a key indicator reflecting the thermal state of the device. Accurate monitoring of junction temperature is therefore essential for tracking device conditions and assessing reliability. This paper provides a comparative review of advances in junction temperature monitoring for silicon carbide-based power devices, systematically analyzing four primary methods: thermal network model, temperature-sensitive electrical parameter, physical contact sensing, and non-contact optical methods. The principles, advantages and limitations as well as applicable situations of each method are analyzed in detail. Furthermore, the evolutionary trajectory of the estimation methods and associated validation techniques are summarized. Finally, challenges and future prospects for junction temperature monitoring for silicon carbide-based power devices are presented. This review concludes that temperature-sensitive electrical parameters method represent the most promising technique for future junction temperature monitoring. Nevertheless, significant challenges persist, particularly in relation to aging-induced coupling and the complexities of accurate parameter extraction. The purpose of this review is to provide helpful theoretical support and methodological guidance to researchers in related fields.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"409-434"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148517251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of Varying Degrees of Power Cycling Aging on Short-Circuit Ruggedness in 1.2-kV SiC MOSFET 功率循环老化程度对1.2 kv SiC MOSFET短路坚固性的影响
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-12 DOI: 10.1109/TDMR.2026.3673394
Pengkai Wang;Yuan Chen;Yangtao Long;Hu He;Junhui Li
As promising candidates for high-performance power system applications, silicon carbide (SiC) metal-oxide-semiconductor field-effect transistors (MOSFETs) have garnered significant attention from the market. However, reliability challenges, particularly under real-world operating conditions involving multi-stress scenarios, remained to be thoroughly investigated. This study systematically examined the impact of varying levels of power cycling (PCT) degradation on the short-circuit (SC) ruggedness of 1.2 kV SiC MOSFET power modules. The changes in DC parameters and defect density during the multi-stresses were quantitatively analyzed, and the failure mechanism was validated through simulations. Additionally, the results revealed that the short-circuit withstand time (SCWT) decreased significantly with progressive levels of PCT aging. This work provides insights into the reliability and operational lifespan of SiC MOSFET under real-world operating conditions.
作为高性能电力系统应用的有前途的候选者,碳化硅(SiC)金属氧化物半导体场效应晶体管(mosfet)已经引起了市场的极大关注。然而,可靠性方面的挑战,特别是在涉及多应力场景的实际操作条件下,仍有待深入研究。本研究系统地研究了不同水平的功率循环(PCT)退化对1.2 kV SiC MOSFET功率模块短路(SC)坚固性的影响。定量分析了多应力作用下直流参数和缺陷密度的变化,并通过仿真验证了失效机理。此外,研究结果显示,随着PCT老化水平的提高,抗短路时间(SCWT)显著降低。这项工作为SiC MOSFET在实际工作条件下的可靠性和使用寿命提供了见解。
{"title":"Influence of Varying Degrees of Power Cycling Aging on Short-Circuit Ruggedness in 1.2-kV SiC MOSFET","authors":"Pengkai Wang;Yuan Chen;Yangtao Long;Hu He;Junhui Li","doi":"10.1109/TDMR.2026.3673394","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3673394","url":null,"abstract":"As promising candidates for high-performance power system applications, silicon carbide (SiC) metal-oxide-semiconductor field-effect transistors (MOSFETs) have garnered significant attention from the market. However, reliability challenges, particularly under real-world operating conditions involving multi-stress scenarios, remained to be thoroughly investigated. This study systematically examined the impact of varying levels of power cycling (PCT) degradation on the short-circuit (SC) ruggedness of 1.2 kV SiC MOSFET power modules. The changes in DC parameters and defect density during the multi-stresses were quantitatively analyzed, and the failure mechanism was validated through simulations. Additionally, the results revealed that the short-circuit withstand time (SCWT) decreased significantly with progressive levels of PCT aging. This work provides insights into the reliability and operational lifespan of SiC MOSFET under real-world operating conditions.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"435-443"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148517252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Avalanche Failure Mechanisms of 1200-V/40-A 4H-SiC Junction Barrier Schottky Diodes With Various Epilayer Defects 具有不同涂层缺陷的1200-V/40-A 4H-SiC结势垒肖特基二极管雪崩失效机理
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-23 DOI: 10.1109/TDMR.2026.3676812
Jinlan Li;Yan Xu;Huaren Sheng;Quanzhi Chen;Ling Dong;Yiming Shi;Yulin Wang;Liming Zhou;Yuan Xu
This study systematically investigates the degradation mechanisms of 1200-V/40-A 4H-SiC junction barrier schottky (JBS) diodes under repetitive avalanche stress. Experimental results reveal a universal rise-then-fall evolution in breakdown voltage, governed by competing effects between interface charge accumulation and material degradation. It is found that failure mode strongly depends on avalanche energy: high-energy pulses induce catastrophic package failure through pin detachment, while low-energy stress causes gradual degradation primarily via transformation of basal plane dislocations, identified as the most critical defects. The study establishes that avalanche robustness constitutes a system-level property, necessitating co-optimization of epitaxial quality, interface stability, and package resilience.
本文系统地研究了1200-V/40-A 4H-SiC结势垒肖特基(JBS)二极管在重复雪崩应力下的降解机制。实验结果表明,击穿电压普遍呈先升后降的变化规律,受界面电荷积累和材料降解的竞争作用支配。研究发现,破坏模式强烈依赖于雪崩能量:高能脉冲通过引脚脱落导致封装灾难性破坏,而低能应力主要通过基面位错的转变导致逐渐退化,这被认为是最关键的缺陷。研究表明,雪崩稳健性构成了系统级特性,需要外延质量、界面稳定性和封装弹性的共同优化。
{"title":"Avalanche Failure Mechanisms of 1200-V/40-A 4H-SiC Junction Barrier Schottky Diodes With Various Epilayer Defects","authors":"Jinlan Li;Yan Xu;Huaren Sheng;Quanzhi Chen;Ling Dong;Yiming Shi;Yulin Wang;Liming Zhou;Yuan Xu","doi":"10.1109/TDMR.2026.3676812","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3676812","url":null,"abstract":"This study systematically investigates the degradation mechanisms of 1200-V/40-A 4H-SiC junction barrier schottky (JBS) diodes under repetitive avalanche stress. Experimental results reveal a universal rise-then-fall evolution in breakdown voltage, governed by competing effects between interface charge accumulation and material degradation. It is found that failure mode strongly depends on avalanche energy: high-energy pulses induce catastrophic package failure through pin detachment, while low-energy stress causes gradual degradation primarily via transformation of basal plane dislocations, identified as the most critical defects. The study establishes that avalanche robustness constitutes a system-level property, necessitating co-optimization of epitaxial quality, interface stability, and package resilience.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"467-474"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148517811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study of the Degradation in p-GaN Gate HEMTs Under Gate Pulse Stress by Transient Current Analysis 用瞬态电流分析研究p-GaN栅极hemt在栅极脉冲应力下的退化
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-06 DOI: 10.1109/TDMR.2026.3671275
Shijie Pan;Shanhai Gu;Shiwei Feng;Yamin Zhang;Xuan Li;Xiaozhuang Lu;Maran Wu
This work investigates the trap-induced degradation in p-GaN gate HEMTs under gate pulse stress via transient current analysis. Electrical measurements demonstrate a positive threshold voltage shift and a reduction in drain current with prolonged bipolar pulse stress. Using the transient current method combined with Bayesian deconvolution, three distinct trap levels designated DP1 to DP3 are identified, whose amplitudes grow consistently with stress time. To clarify the underlying mechanism, bipolar and unipolar pulse stresses are compared at varying frequencies. The threshold voltage shift increases with frequency under bipolar stress but decreases under unipolar stress, confirming that bipolar stress enhances trap density rather than causes transient trap filling. Furthermore, DP1 and DP3 exhibit the significant enhancement in amplitudes, indicating their location near the gate interface where they are vulnerable to pulse-induced carrier injection. Temperature-dependent measurements further confirm that the degradation stems from the density increase of pre-existing traps, with no new trap levels generated. These findings provide critical insight into trap-induced degradation in p-GaN HEMTs, supporting reliability optimization in switching applications.
本研究通过瞬态电流分析研究了p-GaN栅极hemt在栅极脉冲应力下的阱诱导降解。电学测量表明,随着双极脉冲应力的延长,阈值电压正向移动,漏极电流减少。利用瞬态电流法结合贝叶斯反褶积,确定了三个不同的陷阱电平DP1 ~ DP3,它们的振幅随应力时间的增加而增加。为了阐明潜在的机制,双极和单极脉冲应力在不同频率下进行了比较。双极应力下阈值电压位移随频率增加而增加,单极应力下阈值电压位移减小,表明双极应力增加了陷阱密度,而不是导致陷阱填充。此外,DP1和DP3的振幅显著增强,表明它们位于栅极界面附近,容易受到脉冲诱导的载流子注入的影响。与温度相关的测量进一步证实,降解是由于先前存在的陷阱密度增加,而没有产生新的陷阱水平。这些发现为p-GaN hemt中陷阱诱导的退化提供了关键见解,支持了开关应用的可靠性优化。
{"title":"Study of the Degradation in p-GaN Gate HEMTs Under Gate Pulse Stress by Transient Current Analysis","authors":"Shijie Pan;Shanhai Gu;Shiwei Feng;Yamin Zhang;Xuan Li;Xiaozhuang Lu;Maran Wu","doi":"10.1109/TDMR.2026.3671275","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3671275","url":null,"abstract":"This work investigates the trap-induced degradation in p-GaN gate HEMTs under gate pulse stress via transient current analysis. Electrical measurements demonstrate a positive threshold voltage shift and a reduction in drain current with prolonged bipolar pulse stress. Using the transient current method combined with Bayesian deconvolution, three distinct trap levels designated DP1 to DP3 are identified, whose amplitudes grow consistently with stress time. To clarify the underlying mechanism, bipolar and unipolar pulse stresses are compared at varying frequencies. The threshold voltage shift increases with frequency under bipolar stress but decreases under unipolar stress, confirming that bipolar stress enhances trap density rather than causes transient trap filling. Furthermore, DP1 and DP3 exhibit the significant enhancement in amplitudes, indicating their location near the gate interface where they are vulnerable to pulse-induced carrier injection. Temperature-dependent measurements further confirm that the degradation stems from the density increase of pre-existing traps, with no new trap levels generated. These findings provide critical insight into trap-induced degradation in p-GaN HEMTs, supporting reliability optimization in switching applications.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"541-548"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148511057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of Post-Metallization Annealing on the Reliability of Barrierless Mo Word Lines 金属化后退火对无障碍钼字线可靠性的影响
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-11 DOI: 10.1109/TDMR.2026.3673011
D. Tierno;H. Bana;M. H. van der Veen;Y. Jeong;S. Decoster;G. Van den Bosch;J. W. Maes;M. Rosmeulen
Post-metallization annealing (PMA) offers significant resistivity improvements for molybdenum word lines (WLs) in 3D NAND Flash, but its impact on device reliability remains unclear. This work systematically evaluates PMA effects using planar capacitors designed for high-temperature processing, comparing Mo deposited by PVD and ALD on PECVD and PEALD SiO2 under H2 ( $650~^{circ }$ C) and N2 ( $750~^{circ }$ C) annealing. Our electrical characterization reveals trap-assisted Fowler-Nordheim tunneling as the dominant conduction mechanism, with barrier heights significantly influenced by annealing conditions in PEALD SiO2. Time-dependent dielectric breakdown (TDDB) measurements at elevated temperatures confirm that no metal drift occurs even after high-temperature annealing. Failure is caused by a field-driven intrinsic dielectric breakdown, with no evidence of Mo-induced degradation. H2 annealing provides an optimal balance between resistivity improvement and interface quality. These findings establish a pathway for implementing barrierless Mo metallization in sub-30nm z-pitch 3D NAND devices, enabling further vertical scaling while maintaining reliability requirements for both programming and reading operations.
金属化后退火(PMA)可以显著提高3D NAND闪存中钼字线(WLs)的电阻率,但其对器件可靠性的影响尚不清楚。本文系统地评价了PMA对高温处理平面电容器的影响,比较了在H2 ($650~^{circ}$ C)和N2 ($750~^{circ}$ C)退火条件下PVD和ALD沉积Mo在PECVD和PEALD SiO2上的影响。我们的电学表征表明,陷阱辅助的Fowler-Nordheim隧道是主要的传导机制,PEALD SiO2中的势垒高度受退火条件的显著影响。高温下的随时间介电击穿(TDDB)测量证实,即使经过高温退火,也不会发生金属漂移。故障是由场驱动的本征介电击穿引起的,没有证据表明钼引起的退化。H2退火在电阻率改善和界面质量之间提供了最佳平衡。这些发现为在30nm以下z-pitch 3D NAND器件中实现无障碍Mo金属化开辟了一条途径,在保持编程和读取操作可靠性要求的同时,实现了进一步的垂直缩放。
{"title":"Impact of Post-Metallization Annealing on the Reliability of Barrierless Mo Word Lines","authors":"D. Tierno;H. Bana;M. H. van der Veen;Y. Jeong;S. Decoster;G. Van den Bosch;J. W. Maes;M. Rosmeulen","doi":"10.1109/TDMR.2026.3673011","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3673011","url":null,"abstract":"Post-metallization annealing (PMA) offers significant resistivity improvements for molybdenum word lines (WLs) in 3D NAND Flash, but its impact on device reliability remains unclear. This work systematically evaluates PMA effects using planar capacitors designed for high-temperature processing, comparing Mo deposited by PVD and ALD on PECVD and PEALD SiO<sub>2</sub> under H2 (<inline-formula> <tex-math>$650~^{circ }$ </tex-math></inline-formula>C) and N2 (<inline-formula> <tex-math>$750~^{circ }$ </tex-math></inline-formula>C) annealing. Our electrical characterization reveals trap-assisted Fowler-Nordheim tunneling as the dominant conduction mechanism, with barrier heights significantly influenced by annealing conditions in PEALD SiO<sub>2</sub>. Time-dependent dielectric breakdown (TDDB) measurements at elevated temperatures confirm that no metal drift occurs even after high-temperature annealing. Failure is caused by a field-driven intrinsic dielectric breakdown, with no evidence of Mo-induced degradation. H2 annealing provides an optimal balance between resistivity improvement and interface quality. These findings establish a pathway for implementing barrierless Mo metallization in sub-30nm z-pitch 3D NAND devices, enabling further vertical scaling while maintaining reliability requirements for both programming and reading operations.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"451-458"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148512519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Irradiation-Induced Charges Assist SiC/SiO2 Interface Trap Generation Under Gate Switching Stress in SiC MOSFETs 辐照诱导电荷在SiC mosfet栅极开关应力下促进SiC/SiO2界面陷阱的产生
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-04-27 DOI: 10.1109/TDMR.2026.3687417
Jiahao Hu;Xiaochuan Deng;Chunhua Li;Xuan Li;Bo Zhang
The degradation of threshold voltage ( $V_{text {th}}$ ) induced by gate switching stress (GSS) in Silicon carbide metal-oxide-semiconductor field-effect transistors (SiC MOSFETs) is a critical reliability concern in power applications. Locally enhanced electric field and recombination-enhanced defect reactions (REDRs) are the two main mechanisms proposed to explain this degradation. This paper analyzes the degradation behavior of SiC MOSFETs subjected to GSS after total ionizing dose irradiation to gain deeper insight into these degradation mechanisms. By extracting the interface state density ( $D_{text {it}}$ ) and separating the interface trapped charge ( $N_{text {it}}$ ) and oxide trapped charge ( $N_{text {ot}}$ ) from the subthreshold characteristics, it is found that the degradation mechanism under pure GSS is mainly governed by locally enhanced electric field, whereas GSS applied after +15 V gate-bias TID irradiation activates REDRs, generating new interface traps. The main reason is that irradiation-induced interface trapped charges assist electron-hole recombination during GSS, releasing more energy to trigger REDRs. This work contributes to the understanding of $V_{text {th}}$ degradation in SiC MOSFETs under high-frequency switching and provides important guidance for improving their long-term reliability.
碳化硅金属氧化物半导体场效应晶体管(SiC mosfet)中栅极开关应力(GSS)引起的阈值电压($V_{text {th}}}$)退化是电源应用中一个关键的可靠性问题。局部增强电场和重组增强缺陷反应(REDRs)是解释这种降解的两种主要机制。本文分析了总电离剂量辐照后SiC mosfet在GSS作用下的降解行为,以深入了解这些降解机制。通过提取界面态密度($D_{text {it}}$)并从亚阈值特征中分离出界面捕获电荷($N_{text {it}}$)和氧化物捕获电荷($N_{text {ot}}$),发现纯GSS的降解机制主要受局部增强电场控制,而+15 V门偏置TID照射后的GSS激活了REDRs,产生了新的界面陷阱。主要原因是辐照诱导的界面俘获电荷有助于GSS过程中的电子-空穴复合,释放更多能量触发REDRs。这项工作有助于理解高频开关下SiC mosfet的$V_{text {th}}$退化,并为提高其长期可靠性提供重要指导。
{"title":"Irradiation-Induced Charges Assist SiC/SiO2 Interface Trap Generation Under Gate Switching Stress in SiC MOSFETs","authors":"Jiahao Hu;Xiaochuan Deng;Chunhua Li;Xuan Li;Bo Zhang","doi":"10.1109/TDMR.2026.3687417","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3687417","url":null,"abstract":"The degradation of threshold voltage (<inline-formula> <tex-math>$V_{text {th}}$ </tex-math></inline-formula>) induced by gate switching stress (GSS) in Silicon carbide metal-oxide-semiconductor field-effect transistors (SiC MOSFETs) is a critical reliability concern in power applications. Locally enhanced electric field and recombination-enhanced defect reactions (REDRs) are the two main mechanisms proposed to explain this degradation. This paper analyzes the degradation behavior of SiC MOSFETs subjected to GSS after total ionizing dose irradiation to gain deeper insight into these degradation mechanisms. By extracting the interface state density (<inline-formula> <tex-math>$D_{text {it}}$ </tex-math></inline-formula>) and separating the interface trapped charge (<inline-formula> <tex-math>$N_{text {it}}$ </tex-math></inline-formula>) and oxide trapped charge (<inline-formula> <tex-math>$N_{text {ot}}$ </tex-math></inline-formula>) from the subthreshold characteristics, it is found that the degradation mechanism under pure GSS is mainly governed by locally enhanced electric field, whereas GSS applied after +15 V gate-bias TID irradiation activates REDRs, generating new interface traps. The main reason is that irradiation-induced interface trapped charges assist electron-hole recombination during GSS, releasing more energy to trigger REDRs. This work contributes to the understanding of <inline-formula> <tex-math>$V_{text {th}}$ </tex-math></inline-formula> degradation in SiC MOSFETs under high-frequency switching and provides important guidance for improving their long-term reliability.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"629-636"},"PeriodicalIF":2.3,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148214910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Measurement and Modeling of Bond Wire Degradation in TO-Packaged SiC MOSFETs to封装SiC mosfet中键合线退化的测量与建模
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-05 DOI: 10.1109/TDMR.2026.3690502
Zhongyuan Chen;Hongji Li;Meiting Cui;Rui Jin;Li Ran
Bond wire failure is the dominant failure mode in TO (transistor outline) packaged SiC (silicon carbide) power MOSFETs (metal oxide semiconductor field effect transistors) but there is a lack of understanding about the degradation process. To fill in the knowledge gap, it is necessary to quantify the degradation before the final lift-off or breakage, from external measurements without resorting to scanning microscopy or decapsulation. This paper reports such a study by monitoring the change of device resistance during power cycling (PC). The effect of gate threshold voltage drift can be compensated but is found to be small for the samples selected, and the resistance measurement is used to indicate the gradual development of the foot heel crack. The stresses in two different types of discrete SiC power MOSFETs are compared. The study leads to an experimental procedure of extracting the lifetime model for system design and operational management.
在TO(晶体管外形)封装SiC(碳化硅)功率mosfet(金属氧化物半导体场效应晶体管)中,键合线失效是主要的失效模式,但对其降解过程缺乏了解。为了填补知识空白,有必要在最终剥离或破裂之前,通过外部测量来量化降解,而无需借助于扫描显微镜或解封装。本文通过监测电源循环(PC)过程中器件电阻的变化,报道了这一研究。栅极阈值电压漂移的影响可以补偿,但对所选样品的影响较小,并且电阻测量用于指示足跟裂纹的逐渐发展。比较了两种不同类型的离散SiC功率mosfet的应力。该研究为系统设计和运行管理提供了一个寿命模型提取的实验步骤。
{"title":"Measurement and Modeling of Bond Wire Degradation in TO-Packaged SiC MOSFETs","authors":"Zhongyuan Chen;Hongji Li;Meiting Cui;Rui Jin;Li Ran","doi":"10.1109/TDMR.2026.3690502","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3690502","url":null,"abstract":"Bond wire failure is the dominant failure mode in TO (transistor outline) packaged SiC (silicon carbide) power MOSFETs (metal oxide semiconductor field effect transistors) but there is a lack of understanding about the degradation process. To fill in the knowledge gap, it is necessary to quantify the degradation before the final lift-off or breakage, from external measurements without resorting to scanning microscopy or decapsulation. This paper reports such a study by monitoring the change of device resistance during power cycling (PC). The effect of gate threshold voltage drift can be compensated but is found to be small for the samples selected, and the resistance measurement is used to indicate the gradual development of the foot heel crack. The stresses in two different types of discrete SiC power MOSFETs are compared. The study leads to an experimental procedure of extracting the lifetime model for system design and operational management.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"459-466"},"PeriodicalIF":2.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148517250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of Substrate Connection on Dynamic-RON Drift of 650 V Normally-Off Monolithic Bidirectional AlGaN/GaN HEMT 衬底连接对650 V常关单片双向AlGaN/GaN HEMT动态漂移的影响
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-06-01 Epub Date: 2026-03-06 DOI: 10.1109/TDMR.2026.3671620
Marcello Cioni;Alessandro Chini;Giacomo Cappellini;Giovanni Giorgino;Nuri Said;Maurizio Moschetti;Cristina Miccoli;Tariq Wakrim;Alessandro Contarino;Adriano Abbisogni;Antonio Pizzardi;Santo Smerzi;Maria Eloisa Castagna;Aurore Constant;Ferdinando Iucolano
In this letter, we investigate the dynamic-RON drift of monolithic Bidirectional AlGaN/GaN HEMTs. To this end, a novel measurement setup is proposed to evaluate the impact of the substrate connection. Particularly, (i) grounded and (ii) floating substrate configurations are compared. The partial recovery of the RON-degradation at high stress voltage is demonstrated, for the first time, on Bidirectional GaN devices with grounded substrate. Conversely, a higher RON-drift is observed with floating substrate configuration, due to the negative back-bias effect experienced during on-state time interval. This extends the knowledge on this topic, providing physical insights into the large degradation observed in previous work by highlighting the detrimental effect of leaving the substrate floating in Bidirectional power switches.
在这封信中,我们研究了单片双向AlGaN/GaN hemt的动态ron漂移。为此,提出了一种新的测量装置来评估基板连接的影响。特别地,(i)接地和(ii)浮动基板配置进行了比较。在具有接地衬底的双向GaN器件上,首次证明了高应力电压下ron降解的部分恢复。相反,由于在导通状态时间间隔内经历负背偏置效应,在浮动衬底配置下观察到更高的ron漂移。这扩展了对这一主题的知识,通过强调在双向功率开关中使基板漂浮的有害影响,提供了对先前工作中观察到的大退化的物理见解。
{"title":"Impact of Substrate Connection on Dynamic-RON Drift of 650 V Normally-Off Monolithic Bidirectional AlGaN/GaN HEMT","authors":"Marcello Cioni;Alessandro Chini;Giacomo Cappellini;Giovanni Giorgino;Nuri Said;Maurizio Moschetti;Cristina Miccoli;Tariq Wakrim;Alessandro Contarino;Adriano Abbisogni;Antonio Pizzardi;Santo Smerzi;Maria Eloisa Castagna;Aurore Constant;Ferdinando Iucolano","doi":"10.1109/TDMR.2026.3671620","DOIUrl":"https://doi.org/10.1109/TDMR.2026.3671620","url":null,"abstract":"In this letter, we investigate the dynamic-R<sub>ON</sub> drift of monolithic Bidirectional AlGaN/GaN HEMTs. To this end, a novel measurement setup is proposed to evaluate the impact of the substrate connection. Particularly, (i) grounded and (ii) floating substrate configurations are compared. The partial recovery of the R<sub>ON</sub>-degradation at high stress voltage is demonstrated, for the first time, on Bidirectional GaN devices with grounded substrate. Conversely, a higher R<sub>ON</sub>-drift is observed with floating substrate configuration, due to the negative back-bias effect experienced during on-state time interval. This extends the knowledge on this topic, providing physical insights into the large degradation observed in previous work by highlighting the detrimental effect of leaving the substrate floating in Bidirectional power switches.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"26 2","pages":"645-647"},"PeriodicalIF":2.3,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148214889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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IEEE Transactions on Device and Materials Reliability
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